中国物理B ›› 2021, Vol. 30 ›› Issue (12): 120702-120702.doi: 10.1088/1674-1056/ac0522
Design of a novel correlative reflection electron microscope for in-situ real-time chemical analysis
Tian-Long Li(李天龙)1, Zheng Wei(魏征)2, and Wei-Shi Wan(万唯实)1,†
- 1 School of Physical Science and Technology, Shanghai Tech University, Shanghai 201210, China;
2 College of Materials Science and Engineering, Chongqing University, Chongqing 401331, China
Design of a novel correlative reflection electron microscope for in-situ real-time chemical analysis
Tian-Long Li(李天龙)1, Zheng Wei(魏征)2, and Wei-Shi Wan(万唯实)1,†
- 1 School of Physical Science and Technology, Shanghai Tech University, Shanghai 201210, China;
2 College of Materials Science and Engineering, Chongqing University, Chongqing 401331, China
摘要： A novel instrument that integrates reflection high energy electron diffraction (RHEED), electron energy loss spectroscopy (EELS), and imaging is designed and simulated. Since it can correlate the structural, elemental, and spatial information of the same surface region via the simultaneously acquired patterns of RHEED, EELS, and energy-filtered electron microscopy, it is named correlative reflection electron microscopy (c-REM). Our simulation demonstrates that the spatial resolution of this c-REM is lower than 50 nm, which meets the requirements for in-situ monitoring the structural and chemical evolution of surface in advanced material.
中图分类号: (Charged-particle beam sources and detectors)
- 07.77.Ka