Effect of deposition parameters on structural and mechanicalproperties of niobium nitride synthesized by plasma focus device

doi:10.1088/1674-1056/24/6/065204

中国物理B ›› 2015, Vol. 24 ›› Issue (6): 65204-065204.doi: 10.1088/1674-1056/24/6/065204

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇下一篇

Effect of deposition parameters on structural and mechanicalproperties of niobium nitride synthesized by plasma focus device

Jamil Siddiqui^{a b}, Tousif Hussain^a, Riaz Ahmad^{a b}, Nida Khalid^b

a Center for Advanced Studies in Physics (CASP), 1-Church Road, GC University, Lahore, Pakistan;
b Department of Physics, Government College University, 54000 Lahore, Pakistan

收稿日期:2014-09-19 修回日期:2015-01-15 出版日期:2015-06-05 发布日期:2015-06-05
基金资助:
Project supported by the HEC, Pakistan.

Effect of deposition parameters on structural and mechanicalproperties of niobium nitride synthesized by plasma focus device

Jamil Siddiqui^{a b}, Tousif Hussain^a, Riaz Ahmad^{a b}, Nida Khalid^b

a Center for Advanced Studies in Physics (CASP), 1-Church Road, GC University, Lahore, Pakistan;
b Department of Physics, Government College University, 54000 Lahore, Pakistan

Received:2014-09-19 Revised:2015-01-15 Online:2015-06-05 Published:2015-06-05
Contact: Tousif Hussain E-mail:tousifhussain@gcu.edu.pk
About author:52.59.Hq; 52.77.Dq; 61.05.cp; 62.20.Qp
Supported by:
Project supported by the HEC, Pakistan.

摘要/Abstract

摘要： Effects of deposition angle and axial distance on the structural and mechanical properties of niobium nitride synthesized by a dense plasma focus (DPF) system are studied. The x-ray diffraction (XRD) confirms that the deposition parameters affect the growth of multi-phase niobium nitride. Scanning electron microscopy (SEM) shows the granular surface morphology with strong thermally assisted coagulation effects observed at the 5-cm axial distance. The non-porous granular morphology observed at the 9-cm distance along the anode axis is different from those observed at deposition angles of 10° and 20°. Energy dispersive x-ray (EDX) spectroscopy reveals the maximum nitrogen content at the shortest (5 cm) axial position. Atomic force microscopy (AFM) exhibits that the roughness of coated films varies for coatings synthesized at different axial and angular positions, and the Vickers micro-hardness test shows that a maximum hardness value is (08.44± 0.01) GPa for niobium nitride synthesized at 5-cm axial distance, which is about 500% more than that of a virgin sample.

关键词: DPF device, niobium nitride, XRD, SEM, AFM, micro-hardness

Abstract: Effects of deposition angle and axial distance on the structural and mechanical properties of niobium nitride synthesized by a dense plasma focus (DPF) system are studied. The x-ray diffraction (XRD) confirms that the deposition parameters affect the growth of multi-phase niobium nitride. Scanning electron microscopy (SEM) shows the granular surface morphology with strong thermally assisted coagulation effects observed at the 5-cm axial distance. The non-porous granular morphology observed at the 9-cm distance along the anode axis is different from those observed at deposition angles of 10° and 20°. Energy dispersive x-ray (EDX) spectroscopy reveals the maximum nitrogen content at the shortest (5 cm) axial position. Atomic force microscopy (AFM) exhibits that the roughness of coated films varies for coatings synthesized at different axial and angular positions, and the Vickers micro-hardness test shows that a maximum hardness value is (08.44± 0.01) GPa for niobium nitride synthesized at 5-cm axial distance, which is about 500% more than that of a virgin sample.

Key words: DPF device, niobium nitride, XRD, SEM, AFM, micro-hardness

中图分类号: (Dense plasma focus)

52.59.Hq

52.77.Dq (Plasma-based ion implantation and deposition) 61.05.cp (X-ray diffraction) 62.20.Qp (Friction, tribology, and hardness)

Jamil Siddiqui, Tousif Hussain, Riaz Ahmad, Nida Khalid. Effect of deposition parameters on structural and mechanicalproperties of niobium nitride synthesized by plasma focus device[J]. 中国物理B, 2015, 24(6): 65204-065204.

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Effect of deposition parameters on structural and mechanicalproperties of niobium nitride synthesized by plasma focus device

Effect of deposition parameters on structural and mechanicalproperties of niobium nitride synthesized by plasma focus device

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