中国物理B ›› 2002, Vol. 11 ›› Issue (2): 132-138.doi: 10.1088/1009-1963/11/2/306

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Investigation of titanium nitride coating by broadband laser ultrasonic spectroscopy

Walter Lauriks1, Jan Thoen1, 高伟民2, Christ Glorieux3   

  1. (1)Laboratorium voor Akoestiek en Thermische Fysica, Departement Natuurkunde, Katholieke Universiteit Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium; (2)Laboratorium voor Akoestiek en Thermische Fysica, Departement Natuurkunde, Katholieke Universiteit Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium; Lithography Department, Silicon Process Technology Division, Imec, Kapeldreef 75, B-3001 Leuven, Belg; (3)Laboratorium voor Akoestiek en Thermische Fysica, Departement Natuurkunde, Katholieke Universiteit Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium; Postdoctoral Researcher for Fonds voor Wetenschappelijk Onderzoek-Vlaanderen, Belgium
  • 收稿日期:2001-08-02 修回日期:2001-10-10 出版日期:2002-02-13 发布日期:2005-06-13

Investigation of titanium nitride coating by broadband laser ultrasonic spectroscopy

Gao Wei-Min (高伟民)ab, Christ Glorieuxac，Walter Lauriksa, Jan Thoena   

  1. a Laboratorium voor Akoestiek en Thermische Fysica, Departement Natuurkunde, Katholieke Universiteit Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium; b Lithography Department, Silicon Process Technology Division, Imec, Kapeldreef 75, B-3001 Leuven, Belg; c Postdoctoral Researcher for Fonds voor Wetenschappelijk Onderzoek-Vlaanderen, Belgium
  • Received:2001-08-02 Revised:2001-10-10 Online:2002-02-13 Published:2005-06-13

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摘要： We present a laser ultrasonic method to investigate a titanium nitride (TiN) coating specimen. The technique is based on the principle of surface acoustic wave (SAW) dispersion during acoustic propagation on a half-space with the presence of a thin layer. Due to the high efficiency of laser line-source excitation, we have been able to generate and detect a SAW with an excellent signal-to-noise ratio in a wide frequency band. An inverse fitting algorithm was employed to extract simultaneously the thickness and the elastic parameters of the TiN coating from the experimental SAW velocity dispersion curve.

Abstract: We present a laser ultrasonic method to investigate a titanium nitride (TiN) coating specimen. The technique is based on the principle of surface acoustic wave (SAW) dispersion during acoustic propagation on a half-space with the presence of a thin layer. Due to the high efficiency of laser line-source excitation, we have been able to generate and detect a SAW with an excellent signal-to-noise ratio in a wide frequency band. An inverse fitting algorithm was employed to extract simultaneously the thickness and the elastic parameters of the TiN coating from the experimental SAW velocity dispersion curve.

Key words: surface acoustic wave, laser ultrasonics, thin film, inverse problem

中图分类号:  (Ultrasonic velocity, dispersion, scattering, diffraction, and Attenuation in solids; elastic constants)

  • 43.35.Cg
02.30.Zz (Inverse problems) 42.62.Fi (Laser spectroscopy) 43.35.Ns (Acoustical properties of thin films) 43.25.Ed (Effect of nonlinearity on velocity and attenuation)