Room temperature non-balanced electric bridge ethanol gas sensor based on a single ZnO microwire

doi:10.1088/1674-1056/ab593f

中国物理B ›› 2020, Vol. 29 ›› Issue (1): 18102-018102.doi: 10.1088/1674-1056/ab593f

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇下一篇

Room temperature non-balanced electric bridge ethanol gas sensor based on a single ZnO microwire

Yun-Zheng Li(李昀铮), Qiu-Ju Feng(冯秋菊), Bo Shi(石博), Chong Gao(高冲), De-Yu Wang(王德煜), Hong-Wei Liang(梁红伟)

1 School of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029, China;
2 School of Microelectronics, Dalian University of Technology, Dalian 116024, China

收稿日期:2019-07-13 修回日期:2019-10-25 出版日期:2020-01-05 发布日期:2020-01-05
通讯作者: Qiu-Ju Feng E-mail:qjfeng@dlut.edu.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 61574026 and 11405017) and the Liaoning Provincial Natural Science Foundation, China (Grant No. 201602453).

Room temperature non-balanced electric bridge ethanol gas sensor based on a single ZnO microwire

Yun-Zheng Li(李昀铮)¹, Qiu-Ju Feng(冯秋菊)¹, Bo Shi(石博)¹, Chong Gao(高冲)¹, De-Yu Wang(王德煜)¹, Hong-Wei Liang(梁红伟)²

1 School of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029, China;
2 School of Microelectronics, Dalian University of Technology, Dalian 116024, China

Received:2019-07-13 Revised:2019-10-25 Online:2020-01-05 Published:2020-01-05
Contact: Qiu-Ju Feng E-mail:qjfeng@dlut.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 61574026 and 11405017) and the Liaoning Provincial Natural Science Foundation, China (Grant No. 201602453).

摘要/Abstract

摘要： In this paper, ultra-long and large-scaled ZnO microwire arrays are grown by the chemical vapor deposition method, and a single ZnO microwire-based non-balanced electric bridge ethanol gas sensor is fabricated. The experimental results show that the gas sensor has good repeatability, high response rate, short response, and recovery time at room temperature (25 ℃). The response rate of the gas sensor exposed to 90-ppm ethanol is about 93%, with a response time and recovery time are 0.3 s and 0.7 s respectively. As a contrast, the traditional resistive gas sensor of a single ZnO microwire shows very small gas response rate. Therefore, ethanol gas sensor based on non-balanced electric bridge can obviously enhance gas sensing characteristics, which provides a feasible method of developing the high performance ZnO-based gas sensor.

关键词: ZnO microwire, gas sensor, room temperature, ethanol

Abstract: In this paper, ultra-long and large-scaled ZnO microwire arrays are grown by the chemical vapor deposition method, and a single ZnO microwire-based non-balanced electric bridge ethanol gas sensor is fabricated. The experimental results show that the gas sensor has good repeatability, high response rate, short response, and recovery time at room temperature (25 ℃). The response rate of the gas sensor exposed to 90-ppm ethanol is about 93%, with a response time and recovery time are 0.3 s and 0.7 s respectively. As a contrast, the traditional resistive gas sensor of a single ZnO microwire shows very small gas response rate. Therefore, ethanol gas sensor based on non-balanced electric bridge can obviously enhance gas sensing characteristics, which provides a feasible method of developing the high performance ZnO-based gas sensor.

Key words: ZnO microwire, gas sensor, room temperature, ethanol

中图分类号: (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))

81.15.Gh

81.05.Dz (II-VI semiconductors) 85.85.+j (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices) 07.07.Df (Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)

李昀铮, 冯秋菊, 石博, 高冲, 王德煜, 梁红伟. Room temperature non-balanced electric bridge ethanol gas sensor based on a single ZnO microwire[J]. 中国物理B, 2020, 29(1): 18102-018102.

Yun-Zheng Li(李昀铮), Qiu-Ju Feng(冯秋菊), Bo Shi(石博), Chong Gao(高冲), De-Yu Wang(王德煜), Hong-Wei Liang(梁红伟). Room temperature non-balanced electric bridge ethanol gas sensor based on a single ZnO microwire[J]. Chin. Phys. B, 2020, 29(1): 18102-018102.

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Room temperature non-balanced electric bridge ethanol gas sensor based on a single ZnO microwire

Room temperature non-balanced electric bridge ethanol gas sensor based on a single ZnO microwire

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