中国物理B ›› 2018, Vol. 27 ›› Issue (6): 67802-067802.doi: 10.1088/1674-1056/27/6/067802

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Variable angle spectroscopic ellipsometry and its applications in determining optical constants of chalcogenide glasses in infrared

Ning-Ning Wei(韦宁宁), Zhen Yang(杨振), Hong-Bo Pan(潘宏波), Fan Zhang(张凡), Yong-Xing Liu(刘永兴), Rong-Ping Wang(王荣平), Xiang Shen(沈祥), Shi-Xun Dai(戴世勋), Qiu-Hua Nie(聂秋华)   

  1. 1 Laboratory of Infrared Material and Devices, Advanced Technology Research Institute, Ningbo University, Ningbo 315211, China;
    2 Key Laboratory of Photoelectric Materials and Devices of Zhejiang Province, Ningbo 315211, China
  • 收稿日期:2017-12-22 修回日期:2018-03-07 出版日期:2018-06-05 发布日期:2018-06-05
  • 通讯作者: Rong-Ping Wang, Xiang Shen E-mail:wangrongping@nbu.edu.cn;shenxiang@nbu.edu.cn
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos.61775111 and 61775109),the International Cooperation Project of Ningbo City,China (Grant No.2017D10009),the Scientific Research Foundation of Graduate School of Ningbo University,China,and the K C Wong Magna Fund in Ningbo University,China.

Variable angle spectroscopic ellipsometry and its applications in determining optical constants of chalcogenide glasses in infrared

Ning-Ning Wei(韦宁宁)1,2, Zhen Yang(杨振)1,2, Hong-Bo Pan(潘宏波)1,2, Fan Zhang(张凡)1,2, Yong-Xing Liu(刘永兴)1,2, Rong-Ping Wang(王荣平)1,2, Xiang Shen(沈祥)1,2, Shi-Xun Dai(戴世勋)1,2, Qiu-Hua Nie(聂秋华)1,2   

  1. 1 Laboratory of Infrared Material and Devices, Advanced Technology Research Institute, Ningbo University, Ningbo 315211, China;
    2 Key Laboratory of Photoelectric Materials and Devices of Zhejiang Province, Ningbo 315211, China
  • Received:2017-12-22 Revised:2018-03-07 Online:2018-06-05 Published:2018-06-05
  • Contact: Rong-Ping Wang, Xiang Shen E-mail:wangrongping@nbu.edu.cn;shenxiang@nbu.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos.61775111 and 61775109),the International Cooperation Project of Ningbo City,China (Grant No.2017D10009),the Scientific Research Foundation of Graduate School of Ningbo University,China,and the K C Wong Magna Fund in Ningbo University,China.

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摘要： The principle of variable angle spectroscopic ellipsometry (VASE) and the data analysis models, as well as the applications of VASE in the characterization of chalcogenide bulk glasses and thin films are reviewed. By going through the literature and summarizing the application scopes of various analysis models, it is found that a combination of various models, rather than any single data analysis model, is ideal to characterize the optical constants of the chalcogenide bulk glasses and thin films over a wider wavelength range. While the reliable optical data in the mid-and far-infrared region are limited, the VASE is flexible and reliable to solve the issues, making it promising to characterize the optical properties of chalcogenide glasses.

关键词: chalcogenide glasses/thin films, VASE, optical constants, infrared

Abstract: The principle of variable angle spectroscopic ellipsometry (VASE) and the data analysis models, as well as the applications of VASE in the characterization of chalcogenide bulk glasses and thin films are reviewed. By going through the literature and summarizing the application scopes of various analysis models, it is found that a combination of various models, rather than any single data analysis model, is ideal to characterize the optical constants of the chalcogenide bulk glasses and thin films over a wider wavelength range. While the reliable optical data in the mid-and far-infrared region are limited, the VASE is flexible and reliable to solve the issues, making it promising to characterize the optical properties of chalcogenide glasses.

Key words: chalcogenide glasses/thin films, VASE, optical constants, infrared

中图分类号:  (Amorphous materials; glasses and other disordered solids)

  • 78.55.Qr
78.40.-q (Absorption and reflection spectra: visible and ultraviolet) 78.20.Ci (Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity))