Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph

doi:10.1088/1674-1056/26/2/024202

中国物理B ›› 2017, Vol. 26 ›› Issue (2): 24202-024202.doi: 10.1088/1674-1056/26/2/024202

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇下一篇

Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph

Ru Wang(王茹), Xiangxian Wang(王向贤), Hua Yang(杨华), Yunping Qi(祁云平)

1 School of Science, Lanzhou University of Technology, Lanzhou 730050, China;
2 College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China

收稿日期:2016-09-09 修回日期:2016-10-29 出版日期:2017-02-05 发布日期:2017-02-05
通讯作者: Xiangxian Wang E-mail:wangxx869@126.com
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 61505074), the National Key Basic Research Program of China (Grant No. 2013CBA01703), and the HongLiu Young Teachers Training Program Funded Projects of Lanzhou University of Technology (Grant No. Q201509).

Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph

Ru Wang(王茹)¹, Xiangxian Wang(王向贤)¹, Hua Yang(杨华)¹, Yunping Qi(祁云平)²

1 School of Science, Lanzhou University of Technology, Lanzhou 730050, China;
2 College of Physics and Electronic Engineering, Northwest Normal University, Lanzhou 730070, China

Received:2016-09-09 Revised:2016-10-29 Online:2017-02-05 Published:2017-02-05
Contact: Xiangxian Wang E-mail:wangxx869@126.com
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 61505074), the National Key Basic Research Program of China (Grant No. 2013CBA01703), and the HongLiu Young Teachers Training Program Funded Projects of Lanzhou University of Technology (Grant No. Q201509).

摘要/Abstract

摘要： This paper presents the theoretical investigation of hierarchical sub-wavelength photonic structures with various periods and numbers of layers, which were fabricated using a high-order waveguide-mode interference field. A 442-nm laser was used to excite high-order waveguide modes in an asymmetric metal-cladding dielectric waveguide structure. The dispersion curve of the waveguide modes was theoretically analyzed, and the distribution of the interference field of high-order waveguide modes was numerically simulated using the finite-element method. The various dependences of the characteristics of hierarchical sub-wavelength photonic structures on the thickness and refractive index of the photoresist and the waveguide mode were investigated in detail. These hierarchical sub-wavelength photonic structures have various periods and numbers of layers and can be fabricated by a simple and low-cost method.

关键词: sub-wavelength photonic structure, finite-element method, waveguide modes, lithography

Abstract: This paper presents the theoretical investigation of hierarchical sub-wavelength photonic structures with various periods and numbers of layers, which were fabricated using a high-order waveguide-mode interference field. A 442-nm laser was used to excite high-order waveguide modes in an asymmetric metal-cladding dielectric waveguide structure. The dispersion curve of the waveguide modes was theoretically analyzed, and the distribution of the interference field of high-order waveguide modes was numerically simulated using the finite-element method. The various dependences of the characteristics of hierarchical sub-wavelength photonic structures on the thickness and refractive index of the photoresist and the waveguide mode were investigated in detail. These hierarchical sub-wavelength photonic structures have various periods and numbers of layers and can be fabricated by a simple and low-cost method.

Key words: sub-wavelength photonic structure, finite-element method, waveguide modes, lithography

中图分类号: (Interference)

42.25.Hz

42.50.St (Nonclassical interferometry, subwavelength lithography) 42.79.Gn (Optical waveguides and couplers)

王茹, 王向贤, 杨华, 祁云平. Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph[J]. 中国物理B, 2017, 26(2): 24202-024202.

Ru Wang(王茹), Xiangxian Wang(王向贤), Hua Yang(杨华), Yunping Qi(祁云平). Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph[J]. Chin. Phys. B, 2017, 26(2): 24202-024202.

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Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph

Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph

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