›› 2015, Vol. 24 ›› Issue (3): 36801-036801.doi: 10.1088/1674-1056/24/3/036801
• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇 下一篇
孙高迪a b, 董林玺a, 薛忠营b, 陈达b, 郭庆磊b, 母志强b
Sun Gao-Di (孙高迪)a b, Dong Lin-Xi (董林玺)a, Xue Zhong-Ying (薛忠营)b, Chen Da (陈达)b, Guo Qing-Lei (郭庆磊)b, Mu Zhi-Qiang (母志强)b
摘要: Based on the ultra-thin strained silicon-on-insulator (sSOI) technology, by creatively using a hydrofluoric acid (HF) vapor corrosion system to dry etch the SiO2 layer, a large area of suspended strained silicon (sSi) nanomembrane with uniform strain distribution is fabricated. The strain state in the implemented nanomembrane is comprehensively analyzed by using an UV-Raman spectrometer with different laser powers. The results show that the inherent strain is preserved while there are artificial Raman shifts induced by the heat effect, which is proportional to the laser power. The suspended sSOI nanomembrane will be an important material for future novel high-performance devices.
中图分类号: (Mechanical properties; surface strains)