Chin. Phys. B ›› 2013, Vol. 22 ›› Issue (12): 128504-128504.doi: 10.1088/1674-1056/22/12/128504

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    下一篇

Open critical area model and extraction algorithm based on the net flow-axis

王乐a b, 王俊平a, 高艳红a, 许丹a, 李玻玻a, 刘士钢b   

  1. a School of Communication Engineering, Xidian University, Xi’an 710071, China;
    b Microelectronics Institute, Xidian University, Xi’an 710071, China
  • 收稿日期:2013-01-24 修回日期:2013-07-17 出版日期:2013-10-25 发布日期:2013-10-25
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 61173088 and 61070143) and the 111 Project (Grant No. B08038).

Open critical area model and extraction algorithm based on the net flow-axis

Wang Le (王乐)a b, Wang Jun-Ping (王俊平)a, Gao Yan-Hong (高艳红)a, Xu Dan (许丹)a, Li Bo-Bo (李玻玻)a, Liu Shi-Gang (刘士钢)b   

  1. a School of Communication Engineering, Xidian University, Xi’an 710071, China;
    b Microelectronics Institute, Xidian University, Xi’an 710071, China
  • Received:2013-01-24 Revised:2013-07-17 Online:2013-10-25 Published:2013-10-25
  • Contact: Wang Le E-mail:xianwangle@163.com
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 61173088 and 61070143) and the 111 Project (Grant No. B08038).

PDF (PC)

420

赞

摘要： In the integrated circuit manufacturing process, the critical area extraction is a bottleneck to the layout optimization and the integrated circuit yield estimation. In this paper, we study the problem that the missing material defects may result in the open circuit fault. Combining the mathematical morphology theory, we present a new computation model and a novel extraction algorithm for the open critical area based on the net flow-axis. Firstly, we find the net flow-axis for different nets. Then, the net flow-edges based on the net flow-axis are obtained. Finally, we can extract the open critical area by the mathematical morphology. Compared with the existing methods, the nets need not to divide into the horizontal nets and the vertical nets, and the experimental results show that our model and algorithm can accurately extract the size of the open critical area and obtain the location information of the open circuit critical area.

关键词: critical area, mathematical morphology, layout optimization, yield

Abstract: In the integrated circuit manufacturing process, the critical area extraction is a bottleneck to the layout optimization and the integrated circuit yield estimation. In this paper, we study the problem that the missing material defects may result in the open circuit fault. Combining the mathematical morphology theory, we present a new computation model and a novel extraction algorithm for the open critical area based on the net flow-axis. Firstly, we find the net flow-axis for different nets. Then, the net flow-edges based on the net flow-axis are obtained. Finally, we can extract the open critical area by the mathematical morphology. Compared with the existing methods, the nets need not to divide into the horizontal nets and the vertical nets, and the experimental results show that our model and algorithm can accurately extract the size of the open critical area and obtain the location information of the open circuit critical area.

Key words: critical area, mathematical morphology, layout optimization, yield

中图分类号:  (Computer-aided design of microcircuits; layout and modeling)

  • 85.40.Bh
61.72.-y (Defects and impurities in crystals; microstructure)