Rotating polarizer, compensator, and analyzer ellipsometry

doi:10.1088/1674-1056/22/12/120703

Chin. Phys. B ›› 2013, Vol. 22 ›› Issue (12): 120703-120703.doi: 10.1088/1674-1056/22/12/120703

Rotating polarizer, compensator, and analyzer ellipsometry

Sofyan A. Taya, Taher M. El-Agez, Anas A. Alkanoo

Physics Department, Islamic University of Gaza, Gaza, Palestinian Territories

收稿日期:2013-04-09 修回日期:2013-05-21 出版日期:2013-10-25 发布日期:2013-10-25

Rotating polarizer, compensator, and analyzer ellipsometry

Sofyan A. Taya, Taher M. El-Agez, Anas A. Alkanoo

Physics Department, Islamic University of Gaza, Gaza, Palestinian Territories

Received:2013-04-09 Revised:2013-05-21 Online:2013-10-25 Published:2013-10-25
Contact: Sofyan A. Taya E-mail:staya@iugaza.edu.ps

摘要/Abstract

摘要： In this paper we propose theoretically a set of ellipsometric configurations using a rotating polarizer, compensator, and analyzer at a speed ratio of N₁ω:N₂ω:N₃ω. Different ellipsometric configurations can be obtained by giving different integral values to N₁, N₂, and N₃. All configurations are applied to bulk c-Si and GaAs to calculate the real and imaginary parts of the refractive index of the samples. The accuracies of all ellipsometric configurations are investigated in the presence of a hypothetical noise and with small misalignments of the optical elements. Moreover, the uncertainties in the ellipsometric parameters as functions of the uncertainties of the Fourier coefficients are studied. The comparison among different configurations reveals that the rotating compensator–analyzer configuration corresponds to the minimum error in the calculated optical parameters.

关键词: ellipsometry, polarizer, analyzer, compensator

Abstract: In this paper we propose theoretically a set of ellipsometric configurations using a rotating polarizer, compensator, and analyzer at a speed ratio of N₁ω:N₂ω:N₃ω. Different ellipsometric configurations can be obtained by giving different integral values to N₁, N₂, and N₃. All configurations are applied to bulk c-Si and GaAs to calculate the real and imaginary parts of the refractive index of the samples. The accuracies of all ellipsometric configurations are investigated in the presence of a hypothetical noise and with small misalignments of the optical elements. Moreover, the uncertainties in the ellipsometric parameters as functions of the uncertainties of the Fourier coefficients are studied. The comparison among different configurations reveals that the rotating compensator–analyzer configuration corresponds to the minimum error in the calculated optical parameters.

Key words: ellipsometry, polarizer, analyzer, compensator

中图分类号: (Polarimeters and ellipsometers)

07.60.Fs

Sofyan A. Taya, Taher M. El-Agez, Anas A. Alkanoo. Rotating polarizer, compensator, and analyzer ellipsometry[J]. Chin. Phys. B, 2013, 22(12): 120703-120703.

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Rotating polarizer, compensator, and analyzer ellipsometry

Rotating polarizer, compensator, and analyzer ellipsometry

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