中国物理B ›› 2000, Vol. 9 ›› Issue (4): 284-289.doi: 10.1088/1009-1963/9/4/007

• CONDENSED MATTER: STRUCTURAL, MECHANICAL, AND THERMAL PROPERTIES • 上一篇    下一篇

CHARACTERIZATION OF POLYCRYSTALLINE GRADIENT THIN FILM BY X-RAY DIFFRACTION METHOD

李彬, 陶琨, 刘兴涛, 苗伟, 冯涛, 杨宁, 柳百新   

  1. Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China
  • 收稿日期:1999-08-22 出版日期:2005-06-12 发布日期:2005-06-12
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 59471066).

CHARACTERIZATION OF POLYCRYSTALLINE GRADIENT THIN FILM BY X-RAY DIFFRACTION METHOD

Li Bin (李彬), Tao Kun (陶琨), Liu Xing-tao (刘兴涛), Miao Wei (苗伟), Feng Tao (冯涛), Yang Ning (杨宁), Liu Bai-xin (柳百新)   

  1. Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China
  • Received:1999-08-22 Online:2005-06-12 Published:2005-06-12
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 59471066).

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摘要： A direct method is proposed to quantitatively characterize the structural depth profiles emerged in the polycrystalline thin films based on the information obtained by X-ray diffraction (XRD) with various incident angles and treated by a numerical procedure known as the constrained linear inversion. It should be noted that the proposed method was neither sensitive to the random noise appearing in experiment nor to the error originated from the measured thickness of the specimen. To testify the validity of the method, XRD measurements were carried out on a specially designed Pd/Ag bilayer sample, which was annealed at 490℃ for 20 min, and the depth profiles were accordingly calculated through resolving the obtained XRD patterns. The elemental concentration depth profile of the Pd/Ag bilayer sample was in turn calculated from the resolved patterns, which was in good agreement with those obtained by Auger electron analysis on the annealed sample.

Abstract: A direct method is proposed to quantitatively characterize the structural depth profiles emerged in the polycrystalline thin films based on the information obtained by X-ray diffraction (XRD) with various incident angles and treated by a numerical procedure known as the constrained linear inversion. It should be noted that the proposed method was neither sensitive to the random noise appearing in experiment nor to the error originated from the measured thickness of the specimen. To testify the validity of the method, XRD measurements were carried out on a specially designed Pd/Ag bilayer sample, which was annealed at 490℃ for 20 min, and the depth profiles were accordingly calculated through resolving the obtained XRD patterns. The elemental concentration depth profile of the Pd/Ag bilayer sample was in turn calculated from the resolved patterns, which was in good agreement with those obtained by Auger electron analysis on the annealed sample.

中图分类号:  (X-ray diffraction)

  • 61.05.cp
68.55.-a (Thin film structure and morphology)