中国物理B ›› 2006, Vol. 15 ›› Issue (8): 1888-1891.doi: 10.1088/1009-1963/15/8/043

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Deposition of carbon nitride films for space application

王　艺1, 胥　超2, 张福甲2, 冯煜东3   

  1. (1)Lanzhou Institute of Physics, Lanzhou 730000, China; (2)Physics Department, Lanzhou University, Lanzhou 730000,China; (3)Physics Department, Lanzhou University, Lanzhou 730000,China ;Lanzhou Institute of Physics, Lanzhou 730000, China
  • 收稿日期:2005-10-15 修回日期:2006-04-25 出版日期:2006-08-20 发布日期:2006-08-20

Deposition of carbon nitride films for space application

Feng Yu-Dong(冯煜东)a),b), Xu Chao(胥超)a), Wang Yi(王艺)b), and Zhang Fu-Jia(张福甲)a)†   

  1. a Physics Department, Lanzhou University, Lanzhou 730000, China; b Lanzhou Institute of Physics, Lanzhou 730000, China
  • Received:2005-10-15 Revised:2006-04-25 Online:2006-08-20 Published:2006-08-20

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摘要： Carbon nitride thin films were prepared by electron-beam evaporation assisted with nitrogen ion bombardment and TiN/CNx composite films were by unbalanced dc magnetron sputtering, respectively. It was found that the sputtered films were better than the evaporated films in hardness and adhesion. The experiments of atomic oxygen action, cold welding, friction and wearing were emphasized, and the results proved that the sputtered TiN/CNx composite films were suitable for space application.

关键词: CNx film, hardness, atomic oxygen, cold welding, friction, wear

Abstract: Carbon nitride thin films were prepared by electron-beam evaporation assisted with nitrogen ion bombardment and TiN/CNx composite films were by unbalanced dc magnetron sputtering, respectively. It was found that the sputtered films were better than the evaporated films in hardness and adhesion. The experiments of atomic oxygen action, cold welding, friction and wearing were emphasized, and the results proved that the sputtered TiN/CNx composite films were suitable for space application.

Key words: CNx film, hardness, atomic oxygen, cold welding, friction, wear

中图分类号: 

  • 81.15.Ef
81.15.Cd (Deposition by sputtering) 68.60.Bs (Mechanical and acoustical properties) 68.35.Np (Adhesion)