中国物理B ›› 2006, Vol. 15 ›› Issue (2): 432-436.doi: 10.1088/1009-1963/15/2/033

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X-ray diffraction study of effect of deposition conditions on α--β phase transition and stress evolution in sputter-deposited W coatings

BraultPascal1, PineauAlain1, PlantinPascale1, ThomannAnne-Lise1, 王聪2   

  1. (1)Groupie de Recherches sur l'Energé tique des Milieux Ionisés UMR 6606 -CNRS, Ecole Polytechnique de l'Universitéd'Orléans, BP6744 Université d'Orléans, F-45067 Orléans, Cedex 2, France; (2)Groupie de Recherches sur l'Energé tique des Milieux Ionisés UMR 6606 -CNRS, Ecole Polytechnique de l'Universitéd'Orléans, BP6744 Université d'Orléans, F-45067 Orléans, Cedex 2, France;School of Science, Beijing University of Astronautics and Aeronautics, Beijing 100083, China
  • 收稿日期:2005-05-26 修回日期:2005-11-07 出版日期:2006-02-20 发布日期:2006-02-20

X-ray diffraction study of effect of deposition conditions on $\alpha-\beta$ phase transition and stress evolution in sputter-deposited W coatings

Wang Cong (王聪)ab, Pascal Braulta, Alain Pineauc, Pascale Plantina, Anne-Lise Thomanna   

  1. a Groupie de Recherches sur l'Energé tique des Milieux Ionisés UMR 6606 -CNRS, Ecole Polytechnique de l'Universitéd'Orléans, BP6744 Université d'Orléans, F-45067 Orléans, Cedex 2, France; b School of Science, Beijing University of Astronautics and Aeronautics, Beijing 100083, Chinac Centre de Recherches sur la Matière Divisée – UMR 6619 CNRS – Université d'Orléans, 1B rue de la Férollerie, 45071 Orléans, Cedex 2, France
  • Received:2005-05-26 Revised:2005-11-07 Online:2006-02-20 Published:2006-02-20

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摘要： Pure W and W--Cu--W trilayer coatings were deposited on an Fe substrate by d.c. magnetron sputtering. The $\alpha -\beta$ phase evolution, intragranular stress evolution in sputter-deposited W layer were investigated by x-ray diffraction. They are directly related to the film microstructure, density and adhesion. Therefore, control of the film stress and phase component transition is essential for its applications. The phase component transition from $\beta$-W to $\alpha $-W and intragranular stress evolution from tensile to compressive strongly depend on the deposition parameters and can be induced by lowering Ar pressure and rising target power. The compressively stressed films with $\alpha $-W phase have a dense microstructure and high adhesion to Fe substrate.

关键词: W coatings, x-ray diffraction, $\alpha$--$\beta$ phase component transition, thin film stress

Abstract: Pure W and W--Cu--W trilayer coatings were deposited on an Fe substrate by d.c. magnetron sputtering. The $\alpha -\beta$ phase evolution, intragranular stress evolution in sputter-deposited W layer were investigated by x-ray diffraction. They are directly related to the film microstructure, density and adhesion. Therefore, control of the film stress and phase component transition is essential for its applications. The phase component transition from $\beta$-W to $\alpha $-W and intragranular stress evolution from tensile to compressive strongly depend on the deposition parameters and can be induced by lowering Ar pressure and rising target power. The compressively stressed films with $\alpha $-W phase have a dense microstructure and high adhesion to Fe substrate.

Key words: W coatings, x-ray diffraction, $\alpha$--$\beta$ phase component transition, thin film stress

中图分类号:  (X-ray diffraction)

  • 61.05.cp
68.60.Bs (Mechanical and acoustical properties) 81.15.Cd (Deposition by sputtering) 68.35.Gy (Mechanical properties; surface strains) 68.35.Np (Adhesion)