中国物理B ›› 2004, Vol. 13 ›› Issue (2): 190-195.doi: 10.1088/1009-1963/13/2/012

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Basic characteristics of an atmospheric pressure rf generated plasma jet

王守国, 李海江, 叶甜春, 赵玲利   

  1. Microelectronics Research and Development Center, Chinese Academy of Sciences, Beijing 100010, China
  • 收稿日期:2003-05-20 修回日期:2003-10-10 出版日期:2004-02-06 发布日期:2005-07-06

Basic characteristics of an atmospheric pressure rf generated plasma jet

Wang Shou-Guo (王守国), Li Hai-Jiang (李海江), Ye Tian-Chun (叶甜春), Zhao Ling-Li (赵玲利)   

  1. Microelectronics Research and Development Center, Chinese Academy of Sciences, Beijing 100010, China
  • Received:2003-05-20 Revised:2003-10-10 Online:2004-02-06 Published:2005-07-06

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摘要： A plasma jet has been developed which operates using radio frequency (rf) power and produces a stable homogeneous discharge at atmospheric pressure. Its discharge characteristics, especially the dependence of stable discharge operating range on the feed gas, were studied, and the electric parameters such as RMS current, RMS voltage and reflected power were obtained with different gas flows. These studies indicate that there is an optimum range of operation of the plasma jet for a filling with a gas mixture of He and O_2. Two "failure" modes of the discharge are identified. One is a filamentary arc when the input power is raised above a critical level, another is that the discharge disappears gradually as the addition of O_2 approaches 3.2%. Possible explanations for the two failure modes have been given. The current and voltage waveform measurements show that there is a clear phase shift between normal and failure modes. In addition, I－V curves as a function of pure helium and for 1% addition of oxygen have been studied.

关键词: atmospheric pressure, plasma jet, discharge model

Abstract: A plasma jet has been developed which operates using radio frequency (rf) power and produces a stable homogeneous discharge at atmospheric pressure. Its discharge characteristics, especially the dependence of stable discharge operating range on the feed gas, were studied, and the electric parameters such as RMS current, RMS voltage and reflected power were obtained with different gas flows. These studies indicate that there is an optimum range of operation of the plasma jet for a filling with a gas mixture of He and O$_2$. Two "failure" modes of the discharge are identified. One is a filamentary arc when the input power is raised above a critical level, another is that the discharge disappears gradually as the addition of O$_2$ approaches 3.2%. Possible explanations for the two failure modes have been given. The current and voltage waveform measurements show that there is a clear phase shift between normal and failure modes. In addition, I－V curves as a function of pure helium and for 1% addition of oxygen have been studied.

Key words: atmospheric pressure, plasma jet, discharge model

中图分类号:  (Plasma devices)

  • 52.75.-d
52.80.Pi (High-frequency and RF discharges)