中国物理B ›› 1999, Vol. 8 ›› Issue (4): 296-305.doi: 10.1088/1004-423X/8/4/008

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MOLECULAR DYNAMICS SIMULATION OF ENERGETIC ATOM DEPOSITIONS OF Au/Au(100) FILM

潘正瑛1, 汤家镛1, 张庆瑜2   

  1. (1)Accelerator-based Atomic and Nuclear Physics Laboratory, Institute of Modern Physics, Fudan University, Shanghai 200433, China; (2)Accelerator-based Atomic and Nuclear Physics Laboratory, Institute of Modern Physics, Fudan University, Shanghai 200433, China; State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 11602
  • 收稿日期:1998-04-24 修回日期:1998-10-27 出版日期:1999-04-15 发布日期:1999-04-20
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 19835030).

MOLECULAR DYNAMICS SIMULATION OF ENERGETIC ATOM DEPOSITIONS OF Au/Au(100) FILM

Zhang Qing-yu (张庆瑜)ab, Pan Zheng-ying (潘正瑛)a, Tang Jia-yong (汤家镛)a   

  1. a Accelerator-based Atomic and Nuclear Physics Laboratory, Institute of Modern Physics, Fudan University, Shanghai 200433, China; b State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Dalian 116024, China
  • Received:1998-04-24 Revised:1998-10-27 Online:1999-04-15 Published:1999-04-20
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 19835030).

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摘要： The energetic atom deposition of thin Au/Au(100) film has been studied by molecular dynamics simulation using the Au-Au interatomic interaction potential with embedded atom method. By investigating the variation of coverage curves and Bragg diffraction intensities during the film growth, the transition of Stranski-Kranstanov growth mode to Frank-van der Merwe growth mode was observed with the increase of the incident energy of deposition atoms. The role of energetic atoms in the film growth is discussed by analyzing the transport properties of deposited atoms and the evolution of incident energy and substrate temperatures.

Abstract: The energetic atom deposition of thin Au/Au(100) film has been studied by molecular dynamics simulation using the Au-Au interatomic interaction potential with embedded atom method. By investigating the variation of coverage curves and Bragg diffraction intensities during the film growth, the transition of Stranski-Kranstanov growth mode to Frank-van der Merwe growth mode was observed with the increase of the incident energy of deposition atoms. The role of energetic atoms in the film growth is discussed by analyzing the transport properties of deposited atoms and the evolution of incident energy and substrate temperatures.

中图分类号:  (Nucleation and growth)

  • 68.55.A-
81.15.Aa (Theory and models of film growth)