中国物理B ›› 2023, Vol. 32 ›› Issue (4): 44206-044206.doi: 10.1088/1674-1056/ac9821

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Mode characteristics of VCSELs with different shape and size oxidation apertures

Xin-Yu Xie(谢新宇)1,2, Jian Li(李健)1,2, Xiao-Lang Qiu(邱小浪)1,2, Yong-Li Wang(王永丽)1,2, Chuan-Chuan Li(李川川)1,2,†, and Xin Wei(韦欣)1,2   

  1. 1 Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
    2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 收稿日期:2022-08-04 修回日期:2022-09-21 接受日期:2022-10-07 出版日期:2023-03-10 发布日期:2023-03-10
  • 通讯作者: Chuan-Chuan Li E-mail:lichuan@semi.ac.cn

Mode characteristics of VCSELs with different shape and size oxidation apertures

Xin-Yu Xie(谢新宇)1,2, Jian Li(李健)1,2, Xiao-Lang Qiu(邱小浪)1,2, Yong-Li Wang(王永丽)1,2, Chuan-Chuan Li(李川川)1,2,†, and Xin Wei(韦欣)1,2   

  1. 1 Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China;
    2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • Received:2022-08-04 Revised:2022-09-21 Accepted:2022-10-07 Online:2023-03-10 Published:2023-03-10
  • Contact: Chuan-Chuan Li E-mail:lichuan@semi.ac.cn

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摘要： Vertical cavity surface emitting laser (VCSELs) as the ideal light source for rubidium (Rb) and cesium (Cs) atomic clocks is analyzed for its mode and polarization control. We fabricated three kinds of shapes: triangular, elliptic, and circular oxidation apertures which also have different sizes. We formed three different shape oxide apertures by wet-oxidation with 36 μm-39 μm circular mesa. Our results show that triangular oxidized-VCSEL has the advantages of mode and polarization selection over elliptic and circular oxide apertures. When triangular oxide-confined VCSELs emit in single mode, the measured side mode suppression ratio (SMSR) is larger than 20 dB and orthogonal polarization suppression ratio achieves 10 dB. Resonant blueshift of VCSELs with triangular and elliptic apertures is observed with the decrease of aperture size.

关键词: semiconductor lasers, laser diodes, microcavity and microdisk lasers, semiconductor-device characterization, design, modeling

Abstract: Vertical cavity surface emitting laser (VCSELs) as the ideal light source for rubidium (Rb) and cesium (Cs) atomic clocks is analyzed for its mode and polarization control. We fabricated three kinds of shapes: triangular, elliptic, and circular oxidation apertures which also have different sizes. We formed three different shape oxide apertures by wet-oxidation with 36 μm-39 μm circular mesa. Our results show that triangular oxidized-VCSEL has the advantages of mode and polarization selection over elliptic and circular oxide apertures. When triangular oxide-confined VCSELs emit in single mode, the measured side mode suppression ratio (SMSR) is larger than 20 dB and orthogonal polarization suppression ratio achieves 10 dB. Resonant blueshift of VCSELs with triangular and elliptic apertures is observed with the decrease of aperture size.

Key words: semiconductor lasers, laser diodes, microcavity and microdisk lasers, semiconductor-device characterization, design, modeling

中图分类号:  (Semiconductor lasers; laser diodes)

  • 42.55.Px
42.55.Sa (Microcavity and microdisk lasers) 85.30.De (Semiconductor-device characterization, design, and modeling)