中国物理B ›› 2023, Vol. 32 ›› Issue (3): 34209-034209.doi: 10.1088/1674-1056/ac7291

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Anti-symmetric sampled grating quantum cascade laser for mode selection

Qiangqiang Guo(郭强强)1,2, Jinchuan Zhang(张锦川)1,†, Fengmin Cheng(程凤敏)1,2, Ning Zhuo(卓宁)1, Shenqiang Zhai(翟慎强)1, Junqi Liu(刘俊岐)1,2, Lijun Wang(王利军)1,2, Shuman Liu(刘舒曼)1,2, and Fengqi Liu(刘峰奇)1,2,‡   

  1. 1 Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Beijing 100083, China;
    2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 收稿日期:2022-02-26 修回日期:2022-05-10 接受日期:2022-05-24 出版日期:2023-02-14 发布日期:2023-02-14
  • 通讯作者: Jinchuan Zhang, Fengqi Liu E-mail:zhangjinchuan@semi.ac.cn;fqliu@semi.ac.cn
  • 基金资助:
    Project supported by the National Basic Research Program of China (Grant No. 2021YFB3201900), in part by the National Natural Science Foundation of China (Grant Nos. 61991430, 61774146, 61790583, 61627822, and 61774150), in part by the Key Projects of the Chinese Academy of Sciences (Grant Nos. 2018147, YJKYYQ20190002, QYZDJ-SSW-JSC027, and XDB43000000).

Anti-symmetric sampled grating quantum cascade laser for mode selection

Qiangqiang Guo(郭强强)1,2, Jinchuan Zhang(张锦川)1,†, Fengmin Cheng(程凤敏)1,2, Ning Zhuo(卓宁)1, Shenqiang Zhai(翟慎强)1, Junqi Liu(刘俊岐)1,2, Lijun Wang(王利军)1,2, Shuman Liu(刘舒曼)1,2, and Fengqi Liu(刘峰奇)1,2,‡   

  1. 1 Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing Key Laboratory of Low Dimensional Semiconductor Materials and Devices, Beijing 100083, China;
    2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • Received:2022-02-26 Revised:2022-05-10 Accepted:2022-05-24 Online:2023-02-14 Published:2023-02-14
  • Contact: Jinchuan Zhang, Fengqi Liu E-mail:zhangjinchuan@semi.ac.cn;fqliu@semi.ac.cn
  • Supported by:
    Project supported by the National Basic Research Program of China (Grant No. 2021YFB3201900), in part by the National Natural Science Foundation of China (Grant Nos. 61991430, 61774146, 61790583, 61627822, and 61774150), in part by the Key Projects of the Chinese Academy of Sciences (Grant Nos. 2018147, YJKYYQ20190002, QYZDJ-SSW-JSC027, and XDB43000000).

摘要: For mode selection in a quantum cascade laser (QCL), we demonstrate an anti-symmetric sampled grating (ASG). The wavelength of the -1-th mode of this laser has been blue-shifted more than 75 nm (~ 10 cm-1) compared with that of an ordinary sampled grating laser with an emission wavelength of approximately 8.6 μm, when the periodicities within both the base grating and the sample grating are kept constant. Under this condition, an improvement in the continuous tuning capability of the QCL array is ensured. The ASG structure is fabricated in holographic exposure and optical photolithography, thereby enhancing its flexibility, repeatability, and cost-effectiveness. The wavelength modulation capability of the two channels of the grating is insensitive to the variations in channel size, assuming that the overall waveguide width remains constant. The output wavelength can be tailored freely within a certain range by adjusting the width of the ridge and the material of the cladding layer.

关键词: sample grating, tilted grating, quantum cascade laser, mode selection

Abstract: For mode selection in a quantum cascade laser (QCL), we demonstrate an anti-symmetric sampled grating (ASG). The wavelength of the -1-th mode of this laser has been blue-shifted more than 75 nm (~ 10 cm-1) compared with that of an ordinary sampled grating laser with an emission wavelength of approximately 8.6 μm, when the periodicities within both the base grating and the sample grating are kept constant. Under this condition, an improvement in the continuous tuning capability of the QCL array is ensured. The ASG structure is fabricated in holographic exposure and optical photolithography, thereby enhancing its flexibility, repeatability, and cost-effectiveness. The wavelength modulation capability of the two channels of the grating is insensitive to the variations in channel size, assuming that the overall waveguide width remains constant. The output wavelength can be tailored freely within a certain range by adjusting the width of the ridge and the material of the cladding layer.

Key words: sample grating, tilted grating, quantum cascade laser, mode selection

中图分类号:  (Gratings)

  • 42.79.Dj
42.55.Px (Semiconductor lasers; laser diodes) 42.60.Fc (Modulation, tuning, and mode locking)