中国物理B ›› 2023, Vol. 32 ›› Issue (1): 17802-017802.doi: 10.1088/1674-1056/ac6b24

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Method of measuring one-dimensional photonic crystal period-structure-film thickness based on Bloch surface wave enhanced Goos-Hänchen shift

Yao-Pu Lang(郎垚璞)1, Qing-Gang Liu(刘庆纲)1,†, Qi Wang(王奇)1, Xing-Lin Zhou(周兴林)2, and Guang-Yi Jia(贾光一)3   

  1. 1 State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China;
    2 School of Communications, Wuhan University of Science and Technology, Wuhan 430081, China;
    3 School of Science, Tianjin University of Commerce, Tianjin 300134, China
  • 收稿日期:2022-02-17 修回日期:2022-04-20 接受日期:2022-04-28 出版日期:2022-12-08 发布日期:2022-12-27
  • 通讯作者: Qing-Gang Liu E-mail:lqg@tju.edu.cn
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 51575387 and 51827812).

Method of measuring one-dimensional photonic crystal period-structure-film thickness based on Bloch surface wave enhanced Goos-Hänchen shift

Yao-Pu Lang(郎垚璞)1, Qing-Gang Liu(刘庆纲)1,†, Qi Wang(王奇)1, Xing-Lin Zhou(周兴林)2, and Guang-Yi Jia(贾光一)3   

  1. 1 State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China;
    2 School of Communications, Wuhan University of Science and Technology, Wuhan 430081, China;
    3 School of Science, Tianjin University of Commerce, Tianjin 300134, China
  • Received:2022-02-17 Revised:2022-04-20 Accepted:2022-04-28 Online:2022-12-08 Published:2022-12-27
  • Contact: Qing-Gang Liu E-mail:lqg@tju.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 51575387 and 51827812).

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摘要： This paper puts forward a novel method of measuring the thin period-structure-film thickness based on the Bloch surface wave (BSW) enhanced Goos-Hänchen (GH) shift in one-dimensional photonic crystal (1DPC). The BSW phenomenon appearing in 1DPC enhances the GH shift generated in the attenuated total internal reflection structure. The GH shift is closely related to the thickness of the film which is composed of layer-structure of 1DPC. The GH shifts under multiple different incident light conditions will be obtained by varying the wavelength and angle of the measured light, and the thickness distribution of the entire structure of 1DPC is calculated by the particle swarm optimization (PSO) algorithm. The relationship between the structure of a 1DPC film composed of TiO2 and SiO2 layers and the GH shift, is investigated. Under the specific photonic crystal structure and incident conditions, a giant GH shift, 5.1×103 times the wavelength of incidence, can be obtained theoretically. Simulation and calculation results show that the thickness of termination layer and periodic structure bilayer of 1DPC film with 0.1-nm resolution can be obtained by measuring the GH shifts. The exact structure of a 1DPC film is innovatively measured by the BSW-enhanced GH shift.

关键词: thin film thickness, Bloch surface wave (BSW), Goos-Hänchen shift, photonic crystal

Abstract: This paper puts forward a novel method of measuring the thin period-structure-film thickness based on the Bloch surface wave (BSW) enhanced Goos-Hänchen (GH) shift in one-dimensional photonic crystal (1DPC). The BSW phenomenon appearing in 1DPC enhances the GH shift generated in the attenuated total internal reflection structure. The GH shift is closely related to the thickness of the film which is composed of layer-structure of 1DPC. The GH shifts under multiple different incident light conditions will be obtained by varying the wavelength and angle of the measured light, and the thickness distribution of the entire structure of 1DPC is calculated by the particle swarm optimization (PSO) algorithm. The relationship between the structure of a 1DPC film composed of TiO2 and SiO2 layers and the GH shift, is investigated. Under the specific photonic crystal structure and incident conditions, a giant GH shift, 5.1×103 times the wavelength of incidence, can be obtained theoretically. Simulation and calculation results show that the thickness of termination layer and periodic structure bilayer of 1DPC film with 0.1-nm resolution can be obtained by measuring the GH shifts. The exact structure of a 1DPC film is innovatively measured by the BSW-enhanced GH shift.

Key words: thin film thickness, Bloch surface wave (BSW), Goos-Hänchen shift, photonic crystal

中图分类号:  (Multilayers; superlattices; photonic structures; metamaterials)

  • 78.67.Pt
61.05.-a (Techniques for structure determination) 68.65.Ac (Multilayers) 68.55.jd (Thickness)