Finite element simulation of Love wave sensor for the detection of volatile organic gases

doi:10.1088/1674-1056/ac3ec9

中国物理B ›› 2022, Vol. 31 ›› Issue (3): 30701-030701.doi: 10.1088/1674-1056/ac3ec9

Finite element simulation of Love wave sensor for the detection of volatile organic gases

Yan Wang(王艳)^†, Su-Peng Liang(梁苏鹏), Shu-Lin Shang(商树林),Yong-Bing Xiao(肖勇兵), and Yu-Xin Yuan(袁宇鑫)

College of Electronic and Optical Engineering&College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210046, China

收稿日期:2021-01-25 修回日期:2021-10-13 接受日期:2021-12-01 出版日期:2022-02-22 发布日期:2022-02-17
通讯作者: Yan Wang E-mail:ywang@njupt.edu.cn
基金资助:
Project supported by the Foundation of Nanjing University of Posts and Telecommunications, China (Grant No. NY213018).

Finite element simulation of Love wave sensor for the detection of volatile organic gases

Yan Wang(王艳)^†, Su-Peng Liang(梁苏鹏), Shu-Lin Shang(商树林),Yong-Bing Xiao(肖勇兵), and Yu-Xin Yuan(袁宇鑫)

College of Electronic and Optical Engineering&College of Microelectronics, Nanjing University of Posts and Telecommunications, Nanjing 210046, China

Received:2021-01-25 Revised:2021-10-13 Accepted:2021-12-01 Online:2022-02-22 Published:2022-02-17
Contact: Yan Wang E-mail:ywang@njupt.edu.cn
Supported by:
Project supported by the Foundation of Nanjing University of Posts and Telecommunications, China (Grant No. NY213018).

摘要/Abstract

摘要： The three-dimensional (3D) finite element (FE) simulation and analysis of Love wave sensors based on polyisobutylene (PIB) layers/SiO$_{2}$/ST-90$^\circ$X quartz structure are presented in this paper, as well as the investigation of coupled resonance effect on the acoustic properties of the devices. The mass sensitivity of the basic Love wave device with SiO$_{2}$ guiding layers is solved analytically. And the highest mass sensitivity of 128 m$^{2}$/kg is obtained as $h_{\rm s}/\lambda =0.175$. The sensitivity of the Love wave sensors for sensing volatile organic compounds (VOCs) is greatly improved due to the presence of coupled resonance induced by the PIB nanorods on the device surface. The frequency shifts of the sensor corresponding to CH$_{2}$Cl$_{2}$, CHCl$_{3}$, CCl$_{4}$, C$_{2}$Cl$_{4}$, CH$_{3}$Cl and C$_{2}$HCl$_{3}$ with the concentration of 100 ppm are 1.431 kHz, 5.507 kHz, 13.437 kHz, 85.948 kHz, 0.127 kHz and 17.879 kHz, respectively. The viscoelasticity influence of the sensitive material on the characteristics of SAW sensors is also studied. By taking account of the viscoelasticity of the PIB layers, the sensitivities of the SAW sensors with the PIB film and PIB nanorods decay in different degree. The gas sensing property of the Love wave sensor with PIB nanorods is superior to that of the PIB films. Meanwhile, the Love wave sensors with PIB sensitive layers show good selectivity to C$_{2}$Cl$_{4}$, making it an ideal selection for gas sensing applications.

关键词: gas sensor, coupled resonance, nano-structure, Love wave

Abstract: The three-dimensional (3D) finite element (FE) simulation and analysis of Love wave sensors based on polyisobutylene (PIB) layers/SiO$_{2}$/ST-90$^\circ$X quartz structure are presented in this paper, as well as the investigation of coupled resonance effect on the acoustic properties of the devices. The mass sensitivity of the basic Love wave device with SiO$_{2}$ guiding layers is solved analytically. And the highest mass sensitivity of 128 m$^{2}$/kg is obtained as $h_{\rm s}/\lambda =0.175$. The sensitivity of the Love wave sensors for sensing volatile organic compounds (VOCs) is greatly improved due to the presence of coupled resonance induced by the PIB nanorods on the device surface. The frequency shifts of the sensor corresponding to CH$_{2}$Cl$_{2}$, CHCl$_{3}$, CCl$_{4}$, C$_{2}$Cl$_{4}$, CH$_{3}$Cl and C$_{2}$HCl$_{3}$ with the concentration of 100 ppm are 1.431 kHz, 5.507 kHz, 13.437 kHz, 85.948 kHz, 0.127 kHz and 17.879 kHz, respectively. The viscoelasticity influence of the sensitive material on the characteristics of SAW sensors is also studied. By taking account of the viscoelasticity of the PIB layers, the sensitivities of the SAW sensors with the PIB film and PIB nanorods decay in different degree. The gas sensing property of the Love wave sensor with PIB nanorods is superior to that of the PIB films. Meanwhile, the Love wave sensors with PIB sensitive layers show good selectivity to C$_{2}$Cl$_{4}$, making it an ideal selection for gas sensing applications.

Key words: gas sensor, coupled resonance, nano-structure, Love wave

中图分类号: (Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)

07.07.Df

68.35.Iv (Acoustical properties) 77.65.Dq (Acoustoelectric effects and surface acoustic waves (SAW) in piezoelectrics)

Yan Wang(王艳), Su-Peng Liang(梁苏鹏), Shu-Lin Shang(商树林),Yong-Bing Xiao(肖勇兵), and Yu-Xin Yuan(袁宇鑫). Finite element simulation of Love wave sensor for the detection of volatile organic gases[J]. 中国物理B, 2022, 31(3): 30701-030701.

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Finite element simulation of Love wave sensor for the detection of volatile organic gases

Finite element simulation of Love wave sensor for the detection of volatile organic gases

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