中国物理B ›› 2018, Vol. 27 ›› Issue (6): 60701-060701.doi: 10.1088/1674-1056/27/6/060701

• SPECIAL TOPIC—Recent advances in thermoelectric materials and devices • 上一篇    下一篇

Superconducting membrane mechanical oscillator based on vacuum-gap capacitor

Yong-Chao Li(李永超), Xin Dai(戴欣), Jun-Liang Jiang(江俊良), Jia-Zheng Pan(潘佳政), Xing-Yu Wei(魏兴雨), Ya-Peng Lu(卢亚鹏), Sheng Lu(卢盛), Xue-Cou Tu(涂学凑), Guo-Zhu Sun(孙国柱), Pei-Heng Wu(吴培亨)   

  1. 1 Research Institute of Superconductor Electronics, School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China;
    2 Synergetic Innovation Center of Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei 230026, China
  • 收稿日期:2018-01-16 修回日期:2018-03-29 出版日期:2018-06-05 发布日期:2018-06-05
  • 通讯作者: Guo-Zhu Sun E-mail:gzsun@nju.edu.cn
  • 基金资助:

    Project supported by the National Key Research and Development Program of China (Grant No.2016YFA0301801),the National Natural Science Foundation of China (Grant Nos.11474154 and 61521001),and the Priority Academic Development Program of Jiangsu Higher Education Institutions and Dengfeng Project B of Nanjing University,China.

Superconducting membrane mechanical oscillator based on vacuum-gap capacitor

Yong-Chao Li(李永超)1,2, Xin Dai(戴欣)1,2, Jun-Liang Jiang(江俊良)1,2, Jia-Zheng Pan(潘佳政)1,2, Xing-Yu Wei(魏兴雨)1,2, Ya-Peng Lu(卢亚鹏)1,2, Sheng Lu(卢盛)1,2, Xue-Cou Tu(涂学凑)1,2, Guo-Zhu Sun(孙国柱)1,2, Pei-Heng Wu(吴培亨)1,2   

  1. 1 Research Institute of Superconductor Electronics, School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China;
    2 Synergetic Innovation Center of Quantum Information and Quantum Physics, University of Science and Technology of China, Hefei 230026, China
  • Received:2018-01-16 Revised:2018-03-29 Online:2018-06-05 Published:2018-06-05
  • Contact: Guo-Zhu Sun E-mail:gzsun@nju.edu.cn
  • Supported by:

    Project supported by the National Key Research and Development Program of China (Grant No.2016YFA0301801),the National Natural Science Foundation of China (Grant Nos.11474154 and 61521001),and the Priority Academic Development Program of Jiangsu Higher Education Institutions and Dengfeng Project B of Nanjing University,China.

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摘要：

Using the diluted S1813 UV photoresist as a sacrificial layer, we successfully fabricate a superconducting suspended parallel-plate capacitor, in which the top layer of aluminum film acts as a membrane mechanical resonator. Together with a superconducting octagonal spiral inductor, this parallel-plate capacitor constitutes a superconducting microwave resonator. At mK temperature, the transmission characteristic and spectrum of the microwave resonator are measured. Sideband frequencies caused by the vibration of the membrane mechanical resonator are clearly demonstrated. By down-converting with a mixer, the dependence of fundamental frequency and its harmonics on the input microwave power are clearly demonstrated, which is consistent with the numerical simulation.

关键词: superconducting membrane mechanical oscillator, vacuum-gap capacitor

Abstract:

Using the diluted S1813 UV photoresist as a sacrificial layer, we successfully fabricate a superconducting suspended parallel-plate capacitor, in which the top layer of aluminum film acts as a membrane mechanical resonator. Together with a superconducting octagonal spiral inductor, this parallel-plate capacitor constitutes a superconducting microwave resonator. At mK temperature, the transmission characteristic and spectrum of the microwave resonator are measured. Sideband frequencies caused by the vibration of the membrane mechanical resonator are clearly demonstrated. By down-converting with a mixer, the dependence of fundamental frequency and its harmonics on the input microwave power are clearly demonstrated, which is consistent with the numerical simulation.

Key words: superconducting membrane mechanical oscillator, vacuum-gap capacitor

中图分类号:  (Micromechanical devices and systems)

  • 07.10.Cm
81.07.Oj (Nanoelectromechanical systems (NEMS)) 85.25.-j (Superconducting devices) 85.85.+j (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)