中国物理B ›› 2018, Vol. 27 ›› Issue (6): 60701-060701.doi: 10.1088/1674-1056/27/6/060701
• SPECIAL TOPIC—Recent advances in thermoelectric materials and devices • 上一篇 下一篇
Yong-Chao Li(李永超), Xin Dai(戴欣), Jun-Liang Jiang(江俊良), Jia-Zheng Pan(潘佳政), Xing-Yu Wei(魏兴雨), Ya-Peng Lu(卢亚鹏), Sheng Lu(卢盛), Xue-Cou Tu(涂学凑), Guo-Zhu Sun(孙国柱), Pei-Heng Wu(吴培亨)
Yong-Chao Li(李永超)1,2, Xin Dai(戴欣)1,2, Jun-Liang Jiang(江俊良)1,2, Jia-Zheng Pan(潘佳政)1,2, Xing-Yu Wei(魏兴雨)1,2, Ya-Peng Lu(卢亚鹏)1,2, Sheng Lu(卢盛)1,2, Xue-Cou Tu(涂学凑)1,2, Guo-Zhu Sun(孙国柱)1,2, Pei-Heng Wu(吴培亨)1,2
摘要:
Using the diluted S1813 UV photoresist as a sacrificial layer, we successfully fabricate a superconducting suspended parallel-plate capacitor, in which the top layer of aluminum film acts as a membrane mechanical resonator. Together with a superconducting octagonal spiral inductor, this parallel-plate capacitor constitutes a superconducting microwave resonator. At mK temperature, the transmission characteristic and spectrum of the microwave resonator are measured. Sideband frequencies caused by the vibration of the membrane mechanical resonator are clearly demonstrated. By down-converting with a mixer, the dependence of fundamental frequency and its harmonics on the input microwave power are clearly demonstrated, which is consistent with the numerical simulation.
中图分类号: (Micromechanical devices and systems)