中国物理B ›› 2012, Vol. 21 ›› Issue (10): 100702-100702.doi: 10.1088/1674-1056/21/10/100702

• GENERAL • 上一篇    下一篇

Improvement of fabrication and characterization methods for micromechanical disk resonators

赵晖, 骆伟, 郑海洋, 杨晋玲, 杨富华   

  1. Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 收稿日期:2012-03-08 修回日期:2012-04-11 出版日期:2012-09-01 发布日期:2012-09-01
  • 基金资助:
    Project supported by the National Basic Research Program of China (Grant Nos. 2009CB320305 and 2011CB933102).

Improvement of fabrication and characterization methods for micromechanical disk resonators

Zhao Hui (赵晖), Luo Wei (骆伟), Zheng Hai-Yang (郑海洋), Yang Jin-Ling (杨晋玲), Yang Fu-Hua (杨富华)   

  1. Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • Received:2012-03-08 Revised:2012-04-11 Online:2012-09-01 Published:2012-09-01
  • Contact: Yang Jin-Ling E-mail:jlyang@semi.ac.cn
  • Supported by:
    Project supported by the National Basic Research Program of China (Grant Nos. 2009CB320305 and 2011CB933102).

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摘要： In this paper we present a novel method to fabricate reliable micro-electro-mechanical system (MEMS) disk resonators with high yield and good performance. The key breakthrough in the fabrication process is a novel approach to effectively restraining electro-chemical corrosion of polycrystalline silicon (polysilicon) electrically coupled with noble metals of MEMS devices by hydrofluoric acid (HF)-based solutions. In addition, a measurement architecture based on a differential readout topology is demonstrated. The differential circuit proposed here can effectively suppress noise and feed-through current by common-mode rejection of the differential amplifier. This differential amplifier circuit configuration is also used to build up a notch filter. The preliminary result about the temperature dependence of the resonance frequency is discussed, and the device failure is analysed.

关键词: disk resonator, differential readout, electro-chemical corrosion, notch filter

Abstract: In this paper we present a novel method to fabricate reliable micro-electro-mechanical system (MEMS) disk resonators with high yield and good performance. The key breakthrough in the fabrication process is a novel approach to effectively restraining electro-chemical corrosion of polycrystalline silicon (polysilicon) electrically coupled with noble metals of MEMS devices by hydrofluoric acid (HF)-based solutions. In addition, a measurement architecture based on a differential readout topology is demonstrated. The differential circuit proposed here can effectively suppress noise and feed-through current by common-mode rejection of the differential amplifier. This differential amplifier circuit configuration is also used to build up a notch filter. The preliminary result about the temperature dependence of the resonance frequency is discussed, and the device failure is analysed.

Key words: disk resonator, differential readout, electro-chemical corrosion, notch filter

中图分类号:  (Micromechanical devices and systems)

  • 07.10.Cm
85.85.+j (Micro- and nano-electromechanical systems (MEMS/NEMS) and devices)