中国物理B ›› 2017, Vol. 26 ›› Issue (8): 87703-087703.doi: 10.1088/1674-1056/26/8/087703

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

Propagations of Rayleigh and Love waves in ZnO films/glass substrates analyzed by three-dimensional finite element method

Yan Wang(王艳), Ying-Cai Xie(谢英才), Shu-Yi Zhang(张淑仪), Xiao-Dong Lan(兰晓东)   

  1. 1 School of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210046, China;
    2 Laboratory of Modern Acoustics, Institute of Acoustics, Nanjing University, Nanjing 210093, China
  • 收稿日期:2017-03-20 修回日期:2017-04-12 出版日期:2017-08-05 发布日期:2017-08-05
  • 通讯作者: Yan Wang, Shu-Yi Zhang E-mail:ywang@njupt.edu.cn;zhangsy@nju.edu.cn
  • 基金资助:

    Project supported by the National Natural Science Foundation of China (Grant No. 11304160), the Natural Science Foundation of Jiangsu Provincial Higher Education Institutions, China (Grant No. 13KJB140008), and the Foundation of Nanjing University of Posts and Telecommunications, China (Grant No. NY213018).

Propagations of Rayleigh and Love waves in ZnO films/glass substrates analyzed by three-dimensional finite element method

Yan Wang(王艳)1,2, Ying-Cai Xie(谢英才)1, Shu-Yi Zhang(张淑仪)2, Xiao-Dong Lan(兰晓东)2   

  1. 1 School of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210046, China;
    2 Laboratory of Modern Acoustics, Institute of Acoustics, Nanjing University, Nanjing 210093, China
  • Received:2017-03-20 Revised:2017-04-12 Online:2017-08-05 Published:2017-08-05
  • Contact: Yan Wang, Shu-Yi Zhang E-mail:ywang@njupt.edu.cn;zhangsy@nju.edu.cn
  • About author:0.1088/1674-1056/26/8/
  • Supported by:

    Project supported by the National Natural Science Foundation of China (Grant No. 11304160), the Natural Science Foundation of Jiangsu Provincial Higher Education Institutions, China (Grant No. 13KJB140008), and the Foundation of Nanjing University of Posts and Telecommunications, China (Grant No. NY213018).

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摘要：

Propagation characteristics of surface acoustic waves (SAWs) in ZnO films/glass substrates are theoretically investigated by the three-dimensional (3D) finite element method. At first, for (1120) ZnO films/glass substrates, the simulation results confirm that the Rayleigh waves along the [0001] direction and Love waves along the [1100] direction are successfully excited in the multilayered structures. Next, the crystal orientations of the ZnO films are rotated, and the influences of ZnO films with different crystal orientations on SAW characterizations, including the phase velocity, electromechanical coupling coefficient, and temperature coefficient of frequency, are investigated. The results show that at appropriate h/λ, Rayleigh wave has a maximum k2 of 2.4% in (90°, 56.5°, 0°) ZnO film/glass substrate structure; Love wave has a maximum k2 of 3.81% in (56°, 90°, 0°) ZnO film/glass substrate structure. Meantime, for Rayleigh wave and Love wave devices, zero temperature coefficient of frequency (TCF) can be achieved at appropriate ratio of film thickness to SAW wavelength. These results show that SAW devices with higher k2 or lower TCF can be fabricated by flexibly selecting the crystal orientations of ZnO films on glass substrates.

关键词: surface acoustic wave, ZnO films, electromechanical coupling coefficient, temperature coefficient of frequency, 3D finite element method

Abstract:

Propagation characteristics of surface acoustic waves (SAWs) in ZnO films/glass substrates are theoretically investigated by the three-dimensional (3D) finite element method. At first, for (1120) ZnO films/glass substrates, the simulation results confirm that the Rayleigh waves along the [0001] direction and Love waves along the [1100] direction are successfully excited in the multilayered structures. Next, the crystal orientations of the ZnO films are rotated, and the influences of ZnO films with different crystal orientations on SAW characterizations, including the phase velocity, electromechanical coupling coefficient, and temperature coefficient of frequency, are investigated. The results show that at appropriate h/λ, Rayleigh wave has a maximum k2 of 2.4% in (90°, 56.5°, 0°) ZnO film/glass substrate structure; Love wave has a maximum k2 of 3.81% in (56°, 90°, 0°) ZnO film/glass substrate structure. Meantime, for Rayleigh wave and Love wave devices, zero temperature coefficient of frequency (TCF) can be achieved at appropriate ratio of film thickness to SAW wavelength. These results show that SAW devices with higher k2 or lower TCF can be fabricated by flexibly selecting the crystal orientations of ZnO films on glass substrates.

Key words: surface acoustic wave, ZnO films, electromechanical coupling coefficient, temperature coefficient of frequency, 3D finite element method

中图分类号:  (ZnO)

  • 77.55.hf
77.65.Dq (Acoustoelectric effects and surface acoustic waves (SAW) in piezoelectrics) 68.35.Iv (Acoustical properties) 68.60.-p (Physical properties of thin films, nonelectronic)