Effects of N2/O2 flow rate on the surface properties and biocompatibility of nano-structured TiOxNy thin films prepared by high vacuum magnetron sputtering

doi:10.1088/1674-1056/24/7/075202

中国物理B ›› 2015, Vol. 24 ›› Issue (7): 75202-075202.doi: 10.1088/1674-1056/24/7/075202

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇下一篇

Effects of N₂/O₂ flow rate on the surface properties and biocompatibility of nano-structured TiO_xN_y thin films prepared by high vacuum magnetron sputtering

Sehrish Saleem^{a b}, R. Ahmad^a, Uzma Ikhlaq^a, R. Ayub^c, Jin Wei Hong^b, Xu Rui Zhen^b, Li Peng Hui^b, Khizra Abbas^a, Paul K. Chu^b

a Department of Physics, Government College University, Lahore 54000, Pakistan;
b Department of Physics and Materials Science, City University of Hong Kong, Kowloon, Hong Kong, China;
c Centre for Advanced Studies in Physics (CASP), Government College University, Lahore 54000, Pakistan

收稿日期:2014-09-08 修回日期:2015-02-19 出版日期:2015-07-05 发布日期:2015-07-05
基金资助:
Project supported by the Higher Education Commission, Hong Kong Research Grants Council (RGC) General Research Funds (GRF), China (Grant No. 112212) and the City University of Hong Kong Applied Research Grant (ARG), China (Grant No. 9667066).

Effects of N₂/O₂ flow rate on the surface properties and biocompatibility of nano-structured TiO_xN_y thin films prepared by high vacuum magnetron sputtering

Sehrish Saleem^{a b}, R. Ahmad^a, Uzma Ikhlaq^a, R. Ayub^c, Jin Wei Hong^b, Xu Rui Zhen^b, Li Peng Hui^b, Khizra Abbas^a, Paul K. Chu^b

a Department of Physics, Government College University, Lahore 54000, Pakistan;
b Department of Physics and Materials Science, City University of Hong Kong, Kowloon, Hong Kong, China;
c Centre for Advanced Studies in Physics (CASP), Government College University, Lahore 54000, Pakistan

Received:2014-09-08 Revised:2015-02-19 Online:2015-07-05 Published:2015-07-05
Contact: R. Ahmad E-mail:ahriaz@gcu.edu.pk
Supported by:
Project supported by the Higher Education Commission, Hong Kong Research Grants Council (RGC) General Research Funds (GRF), China (Grant No. 112212) and the City University of Hong Kong Applied Research Grant (ARG), China (Grant No. 9667066).

摘要/Abstract

摘要：

NiTi shape memory alloys (SMA) have many biomedical applications due to their excellent mechanical and biocompatible properties. However, nickel in the alloy may cause allergic and toxic reactions, which limit some applications. In this work, titanium oxynitride films were deposited on NiTi samples by high vacuum magnetron sputtering for various nitrogen and oxygen gas flow rates. The x-ray diffraction (XRD) and x-ray photoelectron spectroscopy (XPS) results reveal the presence of different phases in the titanium oxynitride thin films. Energy dispersive spectroscopy (EDS) elemental mapping of samples after immersion in simulated body fluids (SBF) shows that Ni is depleted from the surface and cell cultures corroborate the enhanced biocompatibility in vitro.

关键词: titanium oxynitride films, magnetron sputtering, biocompatibility

Abstract:

Key words: titanium oxynitride films, magnetron sputtering, biocompatibility

中图分类号: (Plasma-material interactions; boundary layer effects)

52.40.Hf

81.15.Cd (Deposition by sputtering) 87.85.jj (Biocompatibility)

Sehrish Saleem, R. Ahmad, Uzma Ikhlaq, R. Ayub, Jin Wei Hong, Xu Rui Zhen, Li Peng Hui, Khizra Abbas, Paul K. Chu. Effects of N₂/O₂ flow rate on the surface properties and biocompatibility of nano-structured TiO_xN_y thin films prepared by high vacuum magnetron sputtering[J]. 中国物理B, 2015, 24(7): 75202-075202.

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Effects of N₂/O₂ flow rate on the surface properties and biocompatibility of nano-structured TiO_xN_y thin films prepared by high vacuum magnetron sputtering

Effects of N₂/O₂ flow rate on the surface properties and biocompatibility of nano-structured TiO_xN_y thin films prepared by high vacuum magnetron sputtering

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