Effects of N
2/O
2 flow rate on the surface properties and biocompatibility of nano-structured TiO
xN
y thin films prepared by high vacuum magnetron sputtering
Sehrish Saleem, R. Ahmad, Uzma Ikhlaq, R. Ayub, Jin Wei Hong, Xu Rui Zhen, Li Peng Hui, Khizra Abbas, Paul K. Chu
Effects of N
2/O
2 flow rate on the surface properties and biocompatibility of nano-structured TiO
xN
y thin films prepared by high vacuum magnetron sputtering
Sehrish Saleem, R. Ahmad, Uzma Ikhlaq, R. Ayub, Jin Wei Hong, Xu Rui Zhen, Li Peng Hui, Khizra Abbas, Paul K. Chu
中国物理B
.
2015, (7): 75202
-075202
.
DOI: 10.1088/1674-1056/24/7/075202