›› 2015, Vol. 24 ›› Issue (2): 20701-020701.doi: 10.1088/1674-1056/24/2/020701

• GENERAL • 上一篇    下一篇

Computer simulation of the bombardment of a copper film on graphene with argon clusters

A. Y. Galashev, O. R. Rakhmanova   

  1. Institute of Industrial Ecology, Ural Branch, Russian Academy of Sciences, Sofia Kovalevskaya Str., 20, Yekaterinburg, 620990, Russia
  • 收稿日期:2014-07-02 修回日期:2014-09-24 出版日期:2015-02-05 发布日期:2015-02-05
  • 基金资助:
    Project supported by the Russian Foundation for Basic Research (Grant No. 13-08-00273).

Computer simulation of the bombardment of a copper film on graphene with argon clusters

A. Y. Galashev, O. R. Rakhmanova   

  1. Institute of Industrial Ecology, Ural Branch, Russian Academy of Sciences, Sofia Kovalevskaya Str., 20, Yekaterinburg, 620990, Russia
  • Received:2014-07-02 Revised:2014-09-24 Online:2015-02-05 Published:2015-02-05
  • Contact: A. Y. Galashev E-mail:alexander-galashev@yandex.ru
  • Supported by:
    Project supported by the Russian Foundation for Basic Research (Grant No. 13-08-00273).

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摘要： The process of graphene cleaning of a copper film by bombarding it with Ar13 clusters is investigated by the molecular dynamics method. The kinetic energies of the clusters are 5, 10, 20, and 30 eV and the incident angles are θ = 90°, 75°, 60°, 45°, and 0°. It is obtained that the cluster energy should be in the interval 20 eV-30 eV for effective graphene cleaning. There is no cleaning effect at vertical incidence (θ = 0°) of Ar13 clusters. The bombardments at 45° and 90° incident angles are the most effective on a moderate and large amount of deposited copper, respectively.

关键词: argon cluster bombardment, copper film, graphene

Abstract: The process of graphene cleaning of a copper film by bombarding it with Ar13 clusters is investigated by the molecular dynamics method. The kinetic energies of the clusters are 5, 10, 20, and 30 eV and the incident angles are θ = 90°, 75°, 60°, 45°, and 0°. It is obtained that the cluster energy should be in the interval 20 eV-30 eV for effective graphene cleaning. There is no cleaning effect at vertical incidence (θ = 0°) of Ar13 clusters. The bombardments at 45° and 90° incident angles are the most effective on a moderate and large amount of deposited copper, respectively.

Key words: argon cluster bombardment, copper film, graphene

中图分类号:  (Computer modeling and simulation)

  • 07.05.Tp
61.48.-c (Structure of fullerenes and related hollow and planar molecular structures) 66.30.Fq (Self-diffusion in metals, semimetals, and alloys) 68.65.Pq (Graphene films)