Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C2H2 discharges

doi:10.1088/1674-1056/23/8/085202

›› 2014, Vol. 23 ›› Issue (8): 85202-085202.doi: 10.1088/1674-1056/23/8/085202

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇下一篇

Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C₂H₂ discharges

刘相梅^a, 李奇楠^a, 徐翔^b

a School of Science, Qiqihar University, Qiqihar 161006, China;
b School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China

收稿日期:2013-11-27 修回日期:2014-01-28 出版日期:2014-08-15 发布日期:2014-08-15
基金资助:
Project supported by the China Postdoctoral Science Foundation (Grant No. 2012M511603), the National Natural Science Foundation of China (Grant Nos. 11105057 and 10775025), and the Fundamental Research Funds for the Central Universities of China (Grant No. DUT12LK39).

Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C₂H₂ discharges

Liu Xiang-Mei (刘相梅)^a, Li Qi-Nan (李奇楠)^a, Xu Xiang (徐翔)^b

a School of Science, Qiqihar University, Qiqihar 161006, China;
b School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China

Received:2013-11-27 Revised:2014-01-28 Online:2014-08-15 Published:2014-08-15
Contact: Liu Xiang-Mei E-mail:lxmjsc98@163.com
Supported by:
Project supported by the China Postdoctoral Science Foundation (Grant No. 2012M511603), the National Natural Science Foundation of China (Grant Nos. 11105057 and 10775025), and the Fundamental Research Funds for the Central Universities of China (Grant No. DUT12LK39).

摘要/Abstract

摘要： A self-consistent fluid model is employed to investigate the coagulation stage of nanoparticle formation, growth, charging, and transport in a radio-frequency capacitively coupled parallel-plate acetylene (C₂H₂) discharge. In our simulation, the distribution of neutral species across the electrode gap is determined by mass continuity, momentum balance, and energy balance equations. Since a thermal gradient in the gas temperature induced by the flow of the neutral gas, a careful study of the thermophoretic force on the spatial distribution of the nanoparticle density profiles is indispensable. In the present paper, we mainly focus on the influences of the gas flow rate, voltage, and gas pressure on the spatial distribution of the nanoparticle density. It appears that the resulting density profile of the 10-nm particles experiences a significant shift towards the upper showerhead electrode once the neutral equations are applied, and a serious shift is observed when increasing the gas flow rate. Thus, the flow of neutral gas can strongly influence the spatial distribution of the particles in the plasma.

关键词: nanoparticle dynamics, acetylene discharges, numerical simulation

Abstract: A self-consistent fluid model is employed to investigate the coagulation stage of nanoparticle formation, growth, charging, and transport in a radio-frequency capacitively coupled parallel-plate acetylene (C₂H₂) discharge. In our simulation, the distribution of neutral species across the electrode gap is determined by mass continuity, momentum balance, and energy balance equations. Since a thermal gradient in the gas temperature induced by the flow of the neutral gas, a careful study of the thermophoretic force on the spatial distribution of the nanoparticle density profiles is indispensable. In the present paper, we mainly focus on the influences of the gas flow rate, voltage, and gas pressure on the spatial distribution of the nanoparticle density. It appears that the resulting density profile of the 10-nm particles experiences a significant shift towards the upper showerhead electrode once the neutral equations are applied, and a serious shift is observed when increasing the gas flow rate. Thus, the flow of neutral gas can strongly influence the spatial distribution of the particles in the plasma.

Key words: nanoparticle dynamics, acetylene discharges, numerical simulation

中图分类号: (Dusty or complex plasmas; plasma crystals)

52.27.Lw

52.65.-y (Plasma simulation) 52.80.Pi (High-frequency and RF discharges)

刘相梅, 李奇楠, 徐翔. Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C₂H₂ discharges[J]. , 2014, 23(8): 85202-085202.

Liu Xiang-Mei (刘相梅), Li Qi-Nan (李奇楠), Xu Xiang (徐翔). Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C₂H₂ discharges[J]. Chin. Phys. B, 2014, 23(8): 85202-085202.

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Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C₂H₂ discharges

Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C₂H₂ discharges

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