Optical properties of aluminum-doped zinc oxide films deposited by direct-current pulse magnetron reactive sputtering

doi:10.1088/1674-1056/23/3/030701

中国物理B ›› 2014, Vol. 23 ›› Issue (3): 30701-030701.doi: 10.1088/1674-1056/23/3/030701

Optical properties of aluminum-doped zinc oxide films deposited by direct-current pulse magnetron reactive sputtering

郜小勇, 陈超, 张飒

School of Physics and Engineering, Zhengzhou University, Zhengzhou 450052, China

收稿日期:2013-06-07 修回日期:2013-09-04 出版日期:2014-03-15 发布日期:2014-03-15
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 60807001), the Foundation of Young Key Teachers from University of Henan Province, China (Grant No. 2011GGJS-008), the Foundation of Graduate Education Support of Zhengzhou University, China, and the Foundation of Graduate Innovation of Zhengzhou University, China (Grant No. 12L00104).

Optical properties of aluminum-doped zinc oxide films deposited by direct-current pulse magnetron reactive sputtering

Gao Xiao-Yong (郜小勇), Chen Chao (陈超), Zhang Sa (张飒)

School of Physics and Engineering, Zhengzhou University, Zhengzhou 450052, China

Received:2013-06-07 Revised:2013-09-04 Online:2014-03-15 Published:2014-03-15
Contact: Gao Xiao-Yong E-mail:xygao@zzu.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 60807001), the Foundation of Young Key Teachers from University of Henan Province, China (Grant No. 2011GGJS-008), the Foundation of Graduate Education Support of Zhengzhou University, China, and the Foundation of Graduate Innovation of Zhengzhou University, China (Grant No. 12L00104).

摘要/Abstract

摘要： A series of <103>-oriented aluminum-doped zinc oxide (AZO) films were deposited on glass substrates via direct-current pulse magnetron reactive sputtering at different O₂-to-Ar gas flow ratios (GFRs). The optical properties of the films were characterized using the fitted optical constants in the general oscillator model (which contains two Psemi-Tri oscillators) through the use of measured ellipsometric parameters. The refractive index dispersion data below the interband absorption edge were analyzed using a single-oscillator model. The fitted optical energy gap obtained using the single-oscillator model clearly shows a blue shift, followed by a red shift, as the GFR increases from 0.9/18 to 2.1/18. This shift can be attributed to the change in the free electron concentration of the film, which is closely related to the film stress. In addition, the fitted β value indicates that the AZO film falls under the ionic class. The photoluminescence spectrum indicates a photoluminescence mechanism of the direct and wide energy gap semiconductor.

关键词: AZO film, spectroscopic ellipsometry, single-oscillator model

Abstract: A series of <103>-oriented aluminum-doped zinc oxide (AZO) films were deposited on glass substrates via direct-current pulse magnetron reactive sputtering at different O₂-to-Ar gas flow ratios (GFRs). The optical properties of the films were characterized using the fitted optical constants in the general oscillator model (which contains two Psemi-Tri oscillators) through the use of measured ellipsometric parameters. The refractive index dispersion data below the interband absorption edge were analyzed using a single-oscillator model. The fitted optical energy gap obtained using the single-oscillator model clearly shows a blue shift, followed by a red shift, as the GFR increases from 0.9/18 to 2.1/18. This shift can be attributed to the change in the free electron concentration of the film, which is closely related to the film stress. In addition, the fitted β value indicates that the AZO film falls under the ionic class. The photoluminescence spectrum indicates a photoluminescence mechanism of the direct and wide energy gap semiconductor.

Key words: AZO film, spectroscopic ellipsometry, single-oscillator model

中图分类号: (Polarimeters and ellipsometers)

07.60.Fs

78.20.-e (Optical properties of bulk materials and thin films) 77.55.hf (ZnO)

郜小勇, 陈超, 张飒. Optical properties of aluminum-doped zinc oxide films deposited by direct-current pulse magnetron reactive sputtering[J]. 中国物理B, 2014, 23(3): 30701-030701.

Gao Xiao-Yong (郜小勇), Chen Chao (陈超), Zhang Sa (张飒). Optical properties of aluminum-doped zinc oxide films deposited by direct-current pulse magnetron reactive sputtering[J]. Chin. Phys. B, 2014, 23(3): 30701-030701.

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Optical properties of aluminum-doped zinc oxide films deposited by direct-current pulse magnetron reactive sputtering

Optical properties of aluminum-doped zinc oxide films deposited by direct-current pulse magnetron reactive sputtering

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