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Optical properties of aluminum-doped zinc oxide films deposited by direct-current pulse magnetron reactive sputtering
郜小勇, 陈超, 张飒
Optical properties of aluminum-doped zinc oxide films deposited by direct-current pulse magnetron reactive sputtering
Gao Xiao-Yong (郜小勇), Chen Chao (陈超), Zhang Sa (张飒)
中国物理B . 2014, (
3
): 30701 -030701 . DOI: 10.1088/1674-1056/23/3/030701