Ellipsometric configurations using a phase retarder and rotating polarizer and analyzer at any speed ratio

doi:10.1088/1674-1056/21/11/110701

中国物理B ›› 2012, Vol. 21 ›› Issue (11): 110701-110701.doi: 10.1088/1674-1056/21/11/110701

Ellipsometric configurations using a phase retarder and rotating polarizer and analyzer at any speed ratio

Sofyan A. Taya, Taher M. El-Agez, Anas A. Alkanoo

Physics Department, Islamic University of Gaza, P.O. Box 108, Gaza, Palestinian Authority

收稿日期:2012-05-22 出版日期:2012-10-01 发布日期:2012-10-01

Ellipsometric configurations using a phase retarder and rotating polarizer and analyzer at any speed ratio

Sofyan A. Taya, Taher M. El-Agez, Anas A. Alkanoo

Physics Department, Islamic University of Gaza, P.O. Box 108, Gaza, Palestinian Authority

Received:2012-05-22 Online:2012-10-01 Published:2012-10-01
Contact: Sofyan A. Taya E-mail:staya@iugaza.edu.ps

摘要/Abstract

摘要： In this paper, we propose an ellipsometer using a phase retarder and rotating polarizer and analyzer at a speed ratio 1:N. Different ellipsometric configurations are presented by assuming N = 1, 2, and 3. Moreover, two values of the offset angle of the retarder are considered for each ellipsometric configuration. The Muller formalism is employed to extract the Stokes parameters, from which the intensity received by the detector is obtained. The optical properties of c-Si are calculated using all configurations. A comparison between different configurations is carried out considering the effect of the noise on the results and the uncertainties in the ellipsometric parameters as functions of the uncertainties of the Fourier coefficients. It is found that the alignment of the phase retarder has a crucial impact on the results and the ellipsometric configuration with speed ratio 1:1 is preferred over the other configurations.

关键词: ellipsometry, phase retarder, rotating polarizer and analyzer

Abstract: In this paper, we propose an ellipsometer using a phase retarder and rotating polarizer and analyzer at a speed ratio 1:N. Different ellipsometric configurations are presented by assuming N = 1, 2, and 3. Moreover, two values of the offset angle of the retarder are considered for each ellipsometric configuration. The Muller formalism is employed to extract the Stokes parameters, from which the intensity received by the detector is obtained. The optical properties of c-Si are calculated using all configurations. A comparison between different configurations is carried out considering the effect of the noise on the results and the uncertainties in the ellipsometric parameters as functions of the uncertainties of the Fourier coefficients. It is found that the alignment of the phase retarder has a crucial impact on the results and the ellipsometric configuration with speed ratio 1:1 is preferred over the other configurations.

Key words: ellipsometry, phase retarder, rotating polarizer and analyzer

中图分类号: (Polarimeters and ellipsometers)

07.60.Fs

Sofyan A. Taya, Taher M. El-Agez, Anas A. Alkanoo . Ellipsometric configurations using a phase retarder and rotating polarizer and analyzer at any speed ratio[J]. 中国物理B, 2012, 21(11): 110701-110701.

Sofyan A. Taya, Taher M. El-Agez, Anas A. Alkanoo. Ellipsometric configurations using a phase retarder and rotating polarizer and analyzer at any speed ratio[J]. Chin. Phys. B, 2012, 21(11): 110701-110701.

参考文献 17

[1]	Azzam R M and Bashara N M 1977 Ellipsometry and Polarized Light (Amsterdam: North-Holland)
[2]	Kim Y T, Collins R W and Vedam K 1990 Surf. Sci. 233 341
[3]	Aspnes D E 2004 Thin Solid Films 455 3
[4]	El-Agez T M, El Tayyan A A and Taya S A 2010 Thin Solid Films 518 5610
[5]	El-Agez T M, Wieliczka D M, Moffitt C and Taya S A 2011 Journal of Atomic, Molecular, and Optical Physics 295304 6
[6]	Aspnes D E 1973 Opt. Commun. 8 222
[7]	Chen L Y, Feng X W, Su Y, Ma H Z and Qian Y H 1994 Appl. Opt. 33 1299
[8]	An I, Park M, Bang K, Oh H and Kim H 2002 Jpn. J. Appl. Phys. 41 3978
[9]	El-Agez T M and Taya S A 2010 Journal of Sensors 706829 7
[10]	El-Agez T M and Taya S A 2011 Physica Scripta 025701 7
[11]	El-Agez T and Taya S A 2011 Opt. Lasers Eng. 49 507
[12]	El-Agez T M, Wieliczka D M, Moffitt C and Taya S A 2011 Physica Scripta 045302 5
[13]	El-Agez T, Taya S A and El Tayayn A 2011 Int. J. Optomechatronics 5 51
[14]	Taya S A and El-Agez T M 2011 Journal of Electromagnetic Analysis and Applications 3 351
[15]	Fujiwara H 2007 Spectroscopic Ellipsometry Principles and Applications (West Sussex: John Wiley & Sons)
[16]	Palik E D 1985 Handbook of Optical Constants of Solids (San Diego: Academic Press)
[17]	Taya S A and El-Agez T M 2012 Physica Scripta 045706 6

Ellipsometric configurations using a phase retarder and rotating polarizer and analyzer at any speed ratio

Ellipsometric configurations using a phase retarder and rotating polarizer and analyzer at any speed ratio

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