中国物理B ›› 2008, Vol. 17 ›› Issue (9): 3512-3515.doi: 10.1088/1674-1056/17/9/062

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Surface oxidation of vanadium dioxide films prepared by radio frequency magnetron sputtering

王学进1, 聂玉昕1, 朱世秋1, 黄峰1, 张葳葳1, 李德华2, 梁春军3, 管康萍3, 成正维3   

  1. (1)College of Science, China Agricultural University, Beijing 100083, China; (2)Laboratory of Optical Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China; (3)School of Science, Beijing Jiaotong University, Beijing 100044, China
  • 收稿日期:2007-12-27 修回日期:2008-02-17 出版日期:2008-09-08 发布日期:2008-09-08
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No 60776039) and China Agricultural University Foundation (Grant No 2007037).

Surface oxidation of vanadium dioxide films prepared by radio frequency magnetron sputtering

Wang Xue-Jin(王学进)a), Liang Chun-Jun(梁春军)b), Guan Kang-Ping(管康萍)b), Li De-Hua(李德华)c), Nie Yu-Xin(聂玉昕)c), Zhu Shi-Oiu(朱世秋)a), Huang Feng(黄峰)a), Zhang Wei-Wei(张葳葳)a), and Cheng Zheng-Wei(成正维)b)   

  1. a College of Science, China Agricultural University, Beijing 100083, China; b School of Science, Beijing Jiaotong University, Beijing 100044, China; c Laboratory of Optical Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
  • Received:2007-12-27 Revised:2008-02-17 Online:2008-09-08 Published:2008-09-08
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No 60776039) and China Agricultural University Foundation (Grant No 2007037).

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摘要： This paper reports that the thermochromic vanadium dioxide films were deposited on various transparent substrates by radio frequency magnetron sputtering, and then aged under circumstance for years. Samples were characterized with several different techniques such as x-ray diffraction, x-ray photoelectron spectroscopy, and Raman, when they were fresh from sputter chamber and aged after years, respectively, in order to determine their structure and composition. It finds that a small amount of sodium occurred on the surface of vanadium dioxide films, which was probably due to sodium ion diffusion from soda-lime glass when sputtering was performed at high substrate temperature. It also finds that aging for years significantly affected the nonstoichiometry of vanadium dioxide films, thus inducing much change in Raman modes.

关键词: surface oxidation, vanadium dioxide, films, magnetron sputtering

Abstract: This paper reports that the thermochromic vanadium dioxide films were deposited on various transparent substrates by radio frequency magnetron sputtering, and then aged under circumstance for years. Samples were characterized with several different techniques such as x-ray diffraction, x-ray photoelectron spectroscopy, and Raman, when they were fresh from sputter chamber and aged after years, respectively, in order to determine their structure and composition. It finds that a small amount of sodium occurred on the surface of vanadium dioxide films, which was probably due to sodium ion diffusion from soda-lime glass when sputtering was performed at high substrate temperature. It also finds that aging for years significantly affected the nonstoichiometry of vanadium dioxide films, thus inducing much change in Raman modes.

Key words: surface oxidation, vanadium dioxide, films, magnetron sputtering

中图分类号:  (Oxidation)

  • 81.65.Mq
61.05.cp (X-ray diffraction) 78.30.Hv (Other nonmetallic inorganics) 78.66.Nk (Insulators) 79.60.Dp (Adsorbed layers and thin films) 81.15.Cd (Deposition by sputtering)