中国物理B ›› 2008, Vol. 17 ›› Issue (9): 3453-3458.doi: 10.1088/1674-1056/17/9/052

• • 上一篇    下一篇

In situ infrared spectroscopic study of cubicboron nitride thin film delamination

杨杭生, 张健英, 聂安民, 张孝彬   

  1. Department of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
  • 收稿日期:2007-10-04 修回日期:2008-03-13 出版日期:2008-09-08 发布日期:2008-09-08
  • 基金资助:
    Project supported by the National Science Foundation of Zhejiang Province, China (Grant No Y405051), the Zhejiang Provincial Education Department, China (Grant No 20061365), and the Education Ministry Scientific Research Startup Foundation for Returnee, C

In situ infrared spectroscopic study of cubicboron nitride thin film delamination

Yang Hang-Sheng(杨杭生)†, Zhang Jian-Ying(张健英), Nie An-Min(聂安民), and Zhang Xiao-Bin(张孝彬)   

  1. Department of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
  • Received:2007-10-04 Revised:2008-03-13 Online:2008-09-08 Published:2008-09-08
  • Supported by:
    Project supported by the National Science Foundation of Zhejiang Province, China (Grant No Y405051), the Zhejiang Provincial Education Department, China (Grant No 20061365), and the Education Ministry Scientific Research Startup Foundation for Returnee, C

PDF (PC)

741

赞

摘要： This paper investigates the procedure of cubic boron nitride (cBN) thin film delamination by Fourier-transform infrared (IR) spectroscopy. It finds that the apparent IR absorption peak area near 1380\,cm$^{-1}$ and 1073\,cm$^{-1}$ attributed to the B--N stretching vibration of sp$^{2}$-bonded BN and the transverse optical phonon of cBN, respectively, increased up to 195{\%} and 175{\%} of the original peak area after film delamination induced compressive stress relaxation. The increase of IR absorption of sp$^{2}$-bonded BN is found to be non-linear and hysteretic to film delamination, which suggests that the relaxation of the turbostratic BN (tBN) layer from the compressed condition is also hysteretic to film delamination. Moreover, cross-sectional transmission electron microscopic observations revealed that cBN film delamination is possible from near the aBN(amorphous BN)/tBN interface at least for films prepared by plasma-enhanced chemical vapour deposition.

关键词: cubic boron nitride films, infrared spectroscopy, delamination, compressive stress relaxation

Abstract: This paper investigates the procedure of cubic boron nitride (cBN) thin film delamination by Fourier-transform infrared (IR) spectroscopy. It finds that the apparent IR absorption peak area near 1380 cm$^{-1}$ and 1073 cm$^{-1}$ attributed to the B--N stretching vibration of sp$^{2}$-bonded BN and the transverse optical phonon of cBN, respectively, increased up to 195% and 175% of the original peak area after film delamination induced compressive stress relaxation. The increase of IR absorption of sp$^{2}$-bonded BN is found to be non-linear and hysteretic to film delamination, which suggests that the relaxation of the turbostratic BN (tBN) layer from the compressed condition is also hysteretic to film delamination. Moreover, cross-sectional transmission electron microscopic observations revealed that cBN film delamination is possible from near the aBN(amorphous BN)/tBN interface at least for films prepared by plasma-enhanced chemical vapour deposition.

Key words: cubic boron nitride films, infrared spectroscopy, delamination, compressive stress relaxation

中图分类号:  (Other nonmetallic inorganics)

  • 78.30.Hv
62.20.F- (Deformation and plasticity) 62.40.+i (Anelasticity, internal friction, stress relaxation, and mechanical resonances) 68.37.Lp (Transmission electron microscopy (TEM)) 68.60.Bs (Mechanical and acoustical properties) 78.66.Nk (Insulators)