中国物理B ›› 2008, Vol. 17 ›› Issue (7): 2562-2566.doi: 10.1088/1674-1056/17/7/037

• CLASSICAL AREAS OF PHENOMENOLOGY • 上一篇    下一篇

Design, fabrication and characterization of a high-performance microring resonator in silicon-on-insulator

黄庆忠, 余金中, 陈少武, 徐学俊, 韩伟华, 樊中朝   

  1. National Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 收稿日期:2007-11-08 修回日期:2007-12-21 出版日期:2008-07-09 发布日期:2008-07-09
  • 基金资助:
    Project supported by the State Key Development Program for Basic Research of China (Grant Nos 2006CB302803 and 2007CB613405), the National High Technology Research and Development Program of China (Grant No 2006AA03Z424) and the National Natural Science Foundation of China (Grant No 60577044).

Design, fabrication and characterization of a high-performance microring resonator in silicon-on-insulator

Huang Qing-Zhong(黄庆忠), Yu Jin-Zhong(余金中)†, Chen Shao-Wu(陈少武), Xu Xue-Jun(徐学俊), Han Wei-Hua(韩伟华), and Fan Zhong-Chao(樊中朝)   

  1. National Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • Received:2007-11-08 Revised:2007-12-21 Online:2008-07-09 Published:2008-07-09
  • Supported by:
    Project supported by the State Key Development Program for Basic Research of China (Grant Nos 2006CB302803 and 2007CB613405), the National High Technology Research and Development Program of China (Grant No 2006AA03Z424) and the National Natural Science Foundation of China (Grant No 60577044).

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摘要： A high-performance microring resonator in a silicon-on-insulator rib waveguide is realized by using the electron beam lithography followed by inductively coupled plasma etching. The design and the experimental realization of this device are presented in detail. In addition to improving relevant processes to minimize propagation loss, the coupling efficiency between the ring and the bus is carefully chosen to approach a critical coupling for high performance operating. We have measured a quality factor of 21,200 and an extinction ratio of 12.5dB at a resonant wavelength of 1549.32nm. Meanwhile, a low propagation loss of 0.89dB/mm in a curved waveguide with a bending radius of 40$\mu $m is demonstrated as well.

Abstract: A high-performance microring resonator in a silicon-on-insulator rib waveguide is realized by using the electron beam lithography followed by inductively coupled plasma etching. The design and the experimental realization of this device are presented in detail. In addition to improving relevant processes to minimize propagation loss, the coupling efficiency between the ring and the bus is carefully chosen to approach a critical coupling for high performance operating. We have measured a quality factor of 21,200 and an extinction ratio of 12.5dB at a resonant wavelength of 1549.32nm. Meanwhile, a low propagation loss of 0.89dB/mm in a curved waveguide with a bending radius of 40$\mu $m is demonstrated as well.

Key words: integrated photonics, microring resonator, quality factor, silicon-on-insulator

中图分类号:  (Design and performance testing of integrated-optical systems)

  • 42.82.Bq
42.79.Gn (Optical waveguides and couplers) 42.82.Cr (Fabrication techniques; lithography, pattern transfer) 42.82.Et (Waveguides, couplers, and arrays)