中国物理B ›› 2008, Vol. 17 ›› Issue (5): 1848-1853.doi: 10.1088/1674-1056/17/5/050

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇    下一篇

Experimental study on parameters of dust plasma in SiH4/C2H4/Ar discharges

吴 静, 张鹏云, 孙继忠, 张 健, 丁振峰, 王德真   

  1. State Key Laboratory of Materials Modification by Laser, Ion and Electron Beam, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China
  • 收稿日期:2007-03-21 修回日期:2007-11-15 出版日期:2008-05-20 发布日期:2008-05-20
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos 10505005 and 10775026).

Experimental study on parameters of dust plasma in SiH4/C2H4/Ar discharges

Wu Jing(吴静), Zhang Peng-Yun(张鹏云), Sun Ji-Zhong(孙继忠), Zhang Jian(张健), Ding Zhen-Feng(丁振峰), and Wang De-Zhen(王德真)†   

  1. State Key Laboratory of Materials Modification by Laser, Ion and Electron Beam, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China
  • Received:2007-03-21 Revised:2007-11-15 Online:2008-05-20 Published:2008-05-20
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos 10505005 and 10775026).

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摘要： Measurements of dust plasma parameters were carried out in the discharges of (SiH4/C2H4/Ar) mixtures. Dust particles were formed in the capacitively coupled radio-frequency discharge of these reactive mixtures in a cylindrical chamber. Langmuir probe was employed for diagnosing and measuring the important plasma parameters such as electron density and electron temperature. The results showed that the electron density dropped, and in contrast the electron temperature rose when the dust particles formed. The curves of the electron density and temperature versus the RF power and pressure were presented and analysed. Further, it was found that the variations of electron temperature and the size of dust void with the RF power followed the similar trends. These trends might be useful for understanding more about the characteristics of dusty voids.

Abstract: Measurements of dust plasma parameters were carried out in the discharges of (SiH4/C2H4/Ar) mixtures. Dust particles were formed in the capacitively coupled radio-frequency discharge of these reactive mixtures in a cylindrical chamber. Langmuir probe was employed for diagnosing and measuring the important plasma parameters such as electron density and electron temperature. The results showed that the electron density dropped, and in contrast the electron temperature rose when the dust particles formed. The curves of the electron density and temperature versus the RF power and pressure were presented and analysed. Further, it was found that the variations of electron temperature and the size of dust void with the RF power followed the similar trends. These trends might be useful for understanding more about the characteristics of dusty voids.

Key words: dust plasma, dust void, electron density, electron temperature, Langmuir probe

中图分类号:  (Dusty or complex plasmas; plasma crystals)

  • 52.27.Lw
52.25.Kn (Thermodynamics of plasmas) 52.70.Ds (Electric and magnetic measurements) 52.80.Pi (High-frequency and RF discharges)