中国物理B ›› 2017, Vol. 26 ›› Issue (4): 45202-045202.doi: 10.1088/1674-1056/26/4/045202

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇    下一篇

Mode transition in dusty micro-plasma driven by pulsed radio-frequency source in C2H2/Ar mixture

Xiang-Mei Liu(刘相梅), Rui Li(李瑞), Ya-Hui Zheng(郑亚辉)   

  1. School of Science, Qiqihar University, Qiqihar 161006, China
  • 收稿日期:2016-10-22 修回日期:2016-12-22 出版日期:2017-04-05 发布日期:2017-04-05
  • 通讯作者: Xiang-Mei Liu E-mail:lxmjsc98@163.com
  • 基金资助:
    Project supported by the Natural Science Foundation of Heilongjiang Province, China (Grant Nos. A2015011 and A2015010), the Postdoctoral Scientific Research Developmental Fund of Heilongjiang Province, China (Grant No. LBH-Q14159), the National Natural Science Foundation of China (Grant Nos. 11404180 and 11405092), and the Program for Young Teachers Scientific Research in Qiqihar University, Heilongjiang Province, China (Grant No. 2014k-Z11).

Mode transition in dusty micro-plasma driven by pulsed radio-frequency source in C2H2/Ar mixture

Xiang-Mei Liu(刘相梅), Rui Li(李瑞), Ya-Hui Zheng(郑亚辉)   

  1. School of Science, Qiqihar University, Qiqihar 161006, China
  • Received:2016-10-22 Revised:2016-12-22 Online:2017-04-05 Published:2017-04-05
  • Contact: Xiang-Mei Liu E-mail:lxmjsc98@163.com
  • Supported by:
    Project supported by the Natural Science Foundation of Heilongjiang Province, China (Grant Nos. A2015011 and A2015010), the Postdoctoral Scientific Research Developmental Fund of Heilongjiang Province, China (Grant No. LBH-Q14159), the National Natural Science Foundation of China (Grant Nos. 11404180 and 11405092), and the Program for Young Teachers Scientific Research in Qiqihar University, Heilongjiang Province, China (Grant No. 2014k-Z11).

摘要: Physical qualities of dusty plasma in the pulsed radio-frequency C2H2/Ar microdischarges are carefully investigated by a one-dimensional hydrodynamic model and aerosol dynamics model. Since the thermophoretic force has a great effect on the nanoparticle density spatial distribution, the neutral gas energy equation is taken into accounted. The effects of pulse parameters (dust ratio, modulation frequency) on the nanoparticle formation and growth process are mainly discussed. The calculation results show that, as the duty ratio increases, the mode transition from the sheath oscillation (α regime) to the secondary electron heating (γ regime) occurred, which is quite different from the conventional pulsed discharge. Moreover, the effect of modulation frequency on the width of sheath and plasma density is analyzed. Compared with the H2CC- ions, the modulation frequency effect on the nanoparticles density becomes more prominent.

关键词: pulsed process parameters, C2H2/Ar microdischarges, dusty plasma

Abstract: Physical qualities of dusty plasma in the pulsed radio-frequency C2H2/Ar microdischarges are carefully investigated by a one-dimensional hydrodynamic model and aerosol dynamics model. Since the thermophoretic force has a great effect on the nanoparticle density spatial distribution, the neutral gas energy equation is taken into accounted. The effects of pulse parameters (dust ratio, modulation frequency) on the nanoparticle formation and growth process are mainly discussed. The calculation results show that, as the duty ratio increases, the mode transition from the sheath oscillation (α regime) to the secondary electron heating (γ regime) occurred, which is quite different from the conventional pulsed discharge. Moreover, the effect of modulation frequency on the width of sheath and plasma density is analyzed. Compared with the H2CC- ions, the modulation frequency effect on the nanoparticles density becomes more prominent.

Key words: pulsed process parameters, C2H2/Ar microdischarges, dusty plasma

中图分类号:  (Dusty or complex plasmas; plasma crystals)

  • 52.27.Lw
52.65.-y (Plasma simulation)