Experimental study on parameters of dust plasma in SiH
4/C
2H
4/Ar discharges
吴 静, 张鹏云, 孙继忠, 张 健, 丁振峰, 王德真
Experimental study on parameters of dust plasma in SiH
4/C
2H
4/Ar discharges
Wu Jing(吴静), Zhang Peng-Yun(张鹏云), Sun Ji-Zhong(孙继忠), Zhang Jian(张健), Ding Zhen-Feng(丁振峰), and Wang De-Zhen(王德真)
中国物理B
.
2008, (5): 1848
-1853
.
DOI: 10.1088/1674-1056/17/5/050