中国物理B ›› 2006, Vol. 15 ›› Issue (4): 813-817.doi: 10.1088/1009-1963/15/4/024

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Semi-quantitative study on the Staebler--Wronski effect of hydrogenated amorphous silicon films prepared with HW-ECR-CVD system

丁毅1, 刘国汉1, 贺德衍1, 张晓康1, 田凌1, 马占杰1, 陈光华2, 朱秀红2, 张文理2, 何斌2   

  1. (1)School of Physical Science and Technology, Lanzhou University,Lanzhou 730000, China; (2)The Key Laboratory of Advanced Functional Materials, Ministry of Education of China, Beijing University of Technology,Beijing 100022,China
  • 收稿日期:2005-12-15 修回日期:2006-01-03 出版日期:2006-04-20 发布日期:2006-04-20
  • 基金资助:
    Project supported by the National Basic Research Program of China (Grant No G2000028201).

Semi-quantitative study on the Staebler--Wronski effect of hydrogenated amorphous silicon films prepared with HW-ECR-CVD system

Ding Yi (丁毅)a, Liu Guo-Han (刘国汉)a, Chen Guang-Hua (陈光华)b, He De-Yan (贺德衍)a, Zhu Xiu-Hong (朱秀红)b, Zhang Wen-Li (张文理)b, He Bin (何斌)b, Zhang Xiao-Kang (张晓康)a, Tian Ling (田凌)a, Ma Zhan-Jie (马占杰)b   

  1. a School of Physical Science and Technology, Lanzhou University, Lanzhou 730000, China; b The Key Laboratory of Advanced Functional Materials, Ministry of Education of China, Beijing University of Technology, Beijing 100022, China
  • Received:2005-12-15 Revised:2006-01-03 Online:2006-04-20 Published:2006-04-20
  • Supported by:
    Project supported by the National Basic Research Program of China (Grant No G2000028201).

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摘要： The method of numerical simulation is used to fit the relationship between the photoconductivity in films and the illumination time. The generation and process rule of kinds of different charged defect states during illumination are revealed. It is found surprisingly that the initial photoconductivity determines directly the total account of photoconductivity degradation of sample.

关键词: hydrogenated amorphous silicon, Staebler--Wronski effect, microwave electron cyclotron\\hbox{\hskip 1.9cm} resonant chemical vapour deposition, charged defects

Abstract: The method of numerical simulation is used to fit the relationship between the photoconductivity in films and the illumination time. The generation and process rule of kinds of different charged defect states during illumination are revealed. It is found surprisingly that the initial photoconductivity determines directly the total account of photoconductivity degradation of sample.

Key words: hydrogenated amorphous silicon, Staebler--Wronski effect, microwave electron cyclotron resonant chemical vapour deposition, charged defects

中图分类号:  (Photoconduction and photovoltaic effects)

  • 73.50.Pz
68.55.Ln (Defects and impurities: doping, implantation, distribution, concentration, etc.) 81.15.Gh (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))