中国物理B ›› 1992, Vol. 1 ›› Issue (3): 211-218.doi: 10.1088/1004-423X/1/3/007

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SUPERCONDUCTING PROPERTIES AND STRUCTURAL PERFECTION OF EPITAXIAL YBa2Cu3O7-x THIN FILMS

李贻杰1, 熊光成1, 甘子钊1, 任琮欣2, 陈国梁2, 邹世昌2   

  1. (1)Department of Physics, Peking University, Beijing 100871, China; (2)Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050, China
  • 收稿日期:1991-12-05 出版日期:1992-03-20 发布日期:1992-03-20
  • 基金资助:
    Project supported by the National Center for Research and Development on Superconductivity of China.

SUPERCONDUCTING PROPERTIES AND STRUCTURAL PERFECTION OF EPITAXIAL YBa2Cu3O7-x THIN FILMS

LI YI-JIE (李贻杰)a, XIONG GUANG-CHENG (熊光成)a, GAN ZI-ZHAO (甘子钊)a, REN CONG-XIN (任琮欣)b, CHEN GUO-LIANG (陈国梁)b, ZOU SHI-CHANG (邹世昌)b   

  1. a Department of Physics, Peking University, Beijing 100871, China; b Ion Beam Laboratory, Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050, China
  • Received:1991-12-05 Online:1992-03-20 Published:1992-03-20
  • Supported by:
    Project supported by the National Center for Research and Development on Superconductivity of China.

摘要: High quality epitaxial YBa2Cu3O7-x thin films have been succcessfully prepared by dc magnetron sputtering deposition, on (100) and (110) aligned SrTiO3, LaAlO3 and yttria-stabilized zirconia (YSZ) substrates. The films showed zero resistance around 90 K and had a Jc (at 77 K, H=0) over 106A/cm2. It was found that superconducting properties and structures of the films were strongly dependent on oxygen pressure and substrate temperature. The epitaxial structure of the films have been studied by X-ray diffraction. Rutherford backscattering and channeling spectroscopy, X-ray double-crystal diffraction and transmission election microscopy. The experimental results demonstrated that the epitaxial YBa2Cu3O7-x films had excellent superconducting properties and quite perfect structure.

Abstract: High quality epitaxial YBa2Cu3O7-x thin films have been succcessfully prepared by dc magnetron sputtering deposition, on (100) and (110) aligned SrTiO3, LaAlO3 and yttria-stabilized zirconia (YSZ) substrates. The films showed zero resistance around 90 K and had a Jc (at 77 K, H=0) over 106A/cm2. It was found that superconducting properties and structures of the films were strongly dependent on oxygen pressure and substrate temperature. The epitaxial structure of the films have been studied by X-ray diffraction. Rutherford backscattering and channeling spectroscopy, X-ray double-crystal diffraction and transmission election microscopy. The experimental results demonstrated that the epitaxial YBa2Cu3O7-x films had excellent superconducting properties and quite perfect structure.

中图分类号: 

  • 74.78.Bz
81.15.Cd (Deposition by sputtering) 74.25.Sv (Critical currents) 68.37.Lp (Transmission electron microscopy (TEM))