中国物理B ›› 1998, Vol. 7 ›› Issue (12): 912-918.doi: 10.1088/1004-423X/7/12/005

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SIMS STUDY OF OXYGEN SPIRAL DIFFUSION C-TEXTURED Yba2Cu3O7-δ/SrTiO3 EPITAXIAL THIN FILM

蔡震, 金学军   

  1. Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050,China
  • 收稿日期:1998-01-13 修回日期:1998-05-06 出版日期:1998-12-20 发布日期:1998-12-20

SIMS STUDY OF OXYGEN SPIRAL DIFFUSION C-TEXTURED Yba2Cu3O7-$\delta$/SrTiO3 EPITAXIAL THIN FILM

CAI ZHEN (蔡震), JIN XUE-JUN (金学军)   

  1. Shanghai Institute of Metallurgy, Academia Sinica, Shanghai 200050,China
  • Received:1998-01-13 Revised:1998-05-06 Online:1998-12-20 Published:1998-12-20

摘要: Secondary ion mass spectroscopy was used to study the chemical diffusivity of 018 in c-textured YBa2Cu3O7-δ/SrTiO3 epitaxial thin film. By fitting experimental data to the one- dimensional diffusion curve, the apparent diffusivity along the c-axis was obtained to be equal to l.02×1014cm2/sec when the temperature was 350℃. A computer analysis method was put forward to calculate the "spiral diffusion" process, and the diffusivity anisotopy of films with different mosaic size obtained. For a film of 7000×7000?2 mosaic size, Dab was found to be ~3.55×10-5xexp((-1.03 ev)/kT) cm2/sec. The calculated results reveal that the variation of the results of Dc is not the result of diffusivity anisotropy but of the difference in mosaic size.

Abstract: Secondary ion mass spectroscopy was used to study the chemical diffusivity of O18 in c-textured YBa2Cu3O7-$\delta$/SrTiO3 epitaxial thin film. By fitting experimental data to the one- dimensional diffusion curve, the apparent diffusivity along the c-axis was obtained to be equal to l.02×1014cm2/sec when the temperature was 350℃. A computer analysis method was put forward to calculate the "spiral diffusion" process, and the diffusivity anisotopy of films with different mosaic size obtained. For a film of 7000×7000?2 mosaic size, Dab was found to be ~3.55×10-5×exp((-1.03 ev)/kT) cm2/sec. The calculated results reveal that the variation of the results of Dc is not the result of diffusivity anisotropy but of the difference in mosaic size.

中图分类号: 

  • 74.72.Bk
79.20.Rf (Atomic, molecular, and ion beam impact and interactions with surfaces)