All-chalcogenide glass based high fill-factor long-wave infrared micro-metalens array with superior optical flexibility

doi:10.1088/1674-1056/add4f5

中国物理B ›› 2025, Vol. 34 ›› Issue (7): 74213-074213.doi: 10.1088/1674-1056/add4f5

All-chalcogenide glass based high fill-factor long-wave infrared micro-metalens array with superior optical flexibility

Zhaofeng Gu(谷招峰)^1,2,†, Kongsi Zhou(周孔思)^1,2,†, Tong Sun(孙童)³, Yixiao Gao(高一骁)^1,2, Yimin Chen(陈益敏)^1,2, Zijun Liu(刘自军)^1,2, Chenjie Gu(顾辰杰)^1,2,3,‡, Pengfei Lu(芦鹏飞)³, and Xiang Shen(沈祥)^1,2,§

1 Laboratory of Infrared Materials and Devices, Research Institute of Advanced Technologies, Ningbo University, Ningbo 315211, China;
2 Zhejiang Key Laboratory of Advanced Optical Functional Materials and Devices, Ningbo 315211, China;
3 Zhejiang Supermat Sen-Ray Optoelectronics Co., Ltd., Ningbo 315400, China

收稿日期:2025-02-07 修回日期:2025-04-10 接受日期:2025-05-07 出版日期:2025-06-18 发布日期:2025-07-03
通讯作者: Chenjie Gu, Xiang Shen E-mail:guchenjie@nbu.edu.cn;shenxiang@nbu.edu.cn
基金资助:
Project supported by the Natural Science Foundation of Zhejiang Province (Grant Nos. LDT23F05015F05 and LDT23F05011F05) and the Joint Funds of the National Natural Science Foundation of China (Grant No. U24A20313).

All-chalcogenide glass based high fill-factor long-wave infrared micro-metalens array with superior optical flexibility

1 Laboratory of Infrared Materials and Devices, Research Institute of Advanced Technologies, Ningbo University, Ningbo 315211, China;
2 Zhejiang Key Laboratory of Advanced Optical Functional Materials and Devices, Ningbo 315211, China;
3 Zhejiang Supermat Sen-Ray Optoelectronics Co., Ltd., Ningbo 315400, China

Received:2025-02-07 Revised:2025-04-10 Accepted:2025-05-07 Online:2025-06-18 Published:2025-07-03
Contact: Chenjie Gu, Xiang Shen E-mail:guchenjie@nbu.edu.cn;shenxiang@nbu.edu.cn
Supported by:
Project supported by the Natural Science Foundation of Zhejiang Province (Grant Nos. LDT23F05015F05 and LDT23F05011F05) and the Joint Funds of the National Natural Science Foundation of China (Grant No. U24A20313).

1. 2025-074213-250171-SI.pdf(592KB)

摘要/Abstract

摘要： Long-wave infrared (LWIR) micro-metalens arrays have emerged as highly flexible and multifunctional optical elements, significantly enhancing the performance of infrared imaging systems. In this work, two types of chalcogenide glass based LWIR micro-metalens arrays with $10 \times 10$ array-size and 100% fill factor were designed and investigated. Specifically, the first one possesses a uniform focal length of 110 μm, and it can efficiently focus the incident light (9.78 μm) into a spot with a full width at half maximum (FWHM) of approximately 11.5 μm ($\sim 1.18\lambda $). Additionally, the second one features flexible and configurable focal lengths of the respective micro-metalenses in the array, and focal lengths of 102 μm, 149 μm, and 182 μm can be achieved on one substrate, while it still retains the same optical performance as the micro-metalens array with a single focal length. Overall, these all-chalcogenide glass based LWIR micro-metasurface arrays possess significant potential for integrating within advanced infrared imaging systems in the future.

关键词: chalcogenide glass, multi-focal micro-metalens array, long-wave infrared, high fill factor

Abstract: Long-wave infrared (LWIR) micro-metalens arrays have emerged as highly flexible and multifunctional optical elements, significantly enhancing the performance of infrared imaging systems. In this work, two types of chalcogenide glass based LWIR micro-metalens arrays with $10 \times 10$ array-size and 100% fill factor were designed and investigated. Specifically, the first one possesses a uniform focal length of 110 μm, and it can efficiently focus the incident light (9.78 μm) into a spot with a full width at half maximum (FWHM) of approximately 11.5 μm ($\sim 1.18\lambda $). Additionally, the second one features flexible and configurable focal lengths of the respective micro-metalenses in the array, and focal lengths of 102 μm, 149 μm, and 182 μm can be achieved on one substrate, while it still retains the same optical performance as the micro-metalens array with a single focal length. Overall, these all-chalcogenide glass based LWIR micro-metasurface arrays possess significant potential for integrating within advanced infrared imaging systems in the future.

Key words: chalcogenide glass, multi-focal micro-metalens array, long-wave infrared, high fill factor

中图分类号: (Optical materials)

42.70.-a

42.82.Cr (Fabrication techniques; lithography, pattern transfer) 95.75.De (Photography and photometry (including microlensing techniques)) 78.20.Bh (Theory, models, and numerical simulation)

Zhaofeng Gu(谷招峰), Kongsi Zhou(周孔思), Tong Sun(孙童), Yixiao Gao(高一骁), Yimin Chen(陈益敏), Zijun Liu(刘自军), Chenjie Gu(顾辰杰), Pengfei Lu(芦鹏飞), and Xiang Shen(沈祥). All-chalcogenide glass based high fill-factor long-wave infrared micro-metalens array with superior optical flexibility[J]. 中国物理B, 2025, 34(7): 74213-074213.

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All-chalcogenide glass based high fill-factor long-wave infrared micro-metalens array with superior optical flexibility

All-chalcogenide glass based high fill-factor long-wave infrared micro-metalens array with superior optical flexibility

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