Stoney formula for piezoelectric film/elastic substrate system

doi:10.1088/1674-1056/26/3/037701

中国物理B ›› 2017, Vol. 26 ›› Issue (3): 37701-037701.doi: 10.1088/1674-1056/26/3/037701

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇下一篇

Stoney formula for piezoelectric film/elastic substrate system

Wang-Min Zhou(周旺民), Wang-Jun Li(李望君), Sheng-Yun Hong(洪圣运), Jie Jin(金杰), Shu-Yuan Yin(尹姝媛)

1 College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou 310014, China;
2 College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310014, China;
3 College of Science, Zhejiang University of Technology, Hangzhou 310023, China

收稿日期:2016-10-08 修回日期:2016-12-06 出版日期:2017-03-05 发布日期:2017-03-05
通讯作者: Wang-Min Zhou E-mail:zhouwm@zjut.edu.cn
基金资助:
Project supported by the Zhejiang Provincial Natural Science Foundation, China (Grant No. Y6100440).

Stoney formula for piezoelectric film/elastic substrate system

Wang-Min Zhou(周旺民)¹, Wang-Jun Li(李望君)¹, Sheng-Yun Hong(洪圣运)¹, Jie Jin(金杰)², Shu-Yuan Yin(尹姝媛)³

1 College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou 310014, China;
2 College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310014, China;
3 College of Science, Zhejiang University of Technology, Hangzhou 310023, China

Received:2016-10-08 Revised:2016-12-06 Online:2017-03-05 Published:2017-03-05
Contact: Wang-Min Zhou E-mail:zhouwm@zjut.edu.cn
Supported by:
Project supported by the Zhejiang Provincial Natural Science Foundation, China (Grant No. Y6100440).

摘要/Abstract

摘要： With the trends in miniaturization, and particularly the introduction of micro- and nano-electro-mechanical system, piezoelectric materials used in microelectronic devices are deposited usually in the form of thin film on elastic substrates. In this work, the bending of a bilayer comprising a piezoelectric film deposited on an elastic substrate, due to the mismatch, is investigated. An analytic formula relating the curvature of the bilayer to the mismatch, the electroelastic constants and the film thickness is obtained, and from this formula, a transverse piezoelectric constant d₃₁ can be estimated. Meanwhile the influence of electromechanical coupling coefficient on the curvature is discussed.

关键词: Stoney formula, piezoelectric film, bending, electromechanical coupling coefficient

Abstract: With the trends in miniaturization, and particularly the introduction of micro- and nano-electro-mechanical system, piezoelectric materials used in microelectronic devices are deposited usually in the form of thin film on elastic substrates. In this work, the bending of a bilayer comprising a piezoelectric film deposited on an elastic substrate, due to the mismatch, is investigated. An analytic formula relating the curvature of the bilayer to the mismatch, the electroelastic constants and the film thickness is obtained, and from this formula, a transverse piezoelectric constant d₃₁ can be estimated. Meanwhile the influence of electromechanical coupling coefficient on the curvature is discussed.

Key words: Stoney formula, piezoelectric film, bending, electromechanical coupling coefficient

中图分类号: (Piezoelectricity and electromechanical effects)

77.65.-j

77.65.Ly (Strain-induced piezoelectric fields) 46.25.Hf (Thermoelasticity and electromagnetic elasticity (electroelasticity, magnetoelasticity))

周旺民, 李望君, 洪圣运, 金杰, 尹姝媛. Stoney formula for piezoelectric film/elastic substrate system[J]. 中国物理B, 2017, 26(3): 37701-037701.

Wang-Min Zhou(周旺民), Wang-Jun Li(李望君), Sheng-Yun Hong(洪圣运), Jie Jin(金杰), Shu-Yuan Yin(尹姝媛). Stoney formula for piezoelectric film/elastic substrate system[J]. Chin. Phys. B, 2017, 26(3): 37701-037701.

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Stoney formula for piezoelectric film/elastic substrate system

Stoney formula for piezoelectric film/elastic substrate system

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