All polymer asymmetric Mach-Zehnder interferometer waveguide sensor by imprinting bonding and laser polishing

doi:10.1088/1674-1056/26/12/124215

中国物理B ›› 2017, Vol. 26 ›› Issue (12): 124215-124215.doi: 10.1088/1674-1056/26/12/124215

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇下一篇

All polymer asymmetric Mach-Zehnder interferometer waveguide sensor by imprinting bonding and laser polishing

Yu Liu(刘豫), Yue Sun(孙月), Yun-Ji Yi(衣云骥), Liang Tian(田亮), Yue Cao(曹悦), Chang-Ming Chen(陈长鸣), Xiao-Qiang Sun(孙小强), Da-Ming Zhang(张大明)

State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China

收稿日期:2017-06-29 修回日期:2017-08-30 出版日期:2017-12-05 发布日期:2017-12-05
通讯作者: Yun-Ji Yi E-mail:yiyj@jlu.edu.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 61605057, 61475061, and 61575076), the Science and Technology Development Plan of Jilin Province, China (Grant No. 20140519006JH), and the Excellent Youth Foundation of Jilin Province, China (Grant No. 20170520158JH).

All polymer asymmetric Mach-Zehnder interferometer waveguide sensor by imprinting bonding and laser polishing

Yu Liu(刘豫), Yue Sun(孙月), Yun-Ji Yi(衣云骥), Liang Tian(田亮), Yue Cao(曹悦), Chang-Ming Chen(陈长鸣), Xiao-Qiang Sun(孙小强), Da-Ming Zhang(张大明)

State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China

Received:2017-06-29 Revised:2017-08-30 Online:2017-12-05 Published:2017-12-05
Contact: Yun-Ji Yi E-mail:yiyj@jlu.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 61605057, 61475061, and 61575076), the Science and Technology Development Plan of Jilin Province, China (Grant No. 20140519006JH), and the Excellent Youth Foundation of Jilin Province, China (Grant No. 20170520158JH).

摘要/Abstract

摘要： We present an all polymer asymmetric Mach-Zehnder interferometer (AMZI) waveguide sensor based on imprinting bonding and laser polishing method. The fabrication methods are compatible with high accuracy waveguide sensing structure. The rectangle waveguide structure of this sensor has three sensing surfaces contacting the test media, and its sensing accuracy can be increased 5 times compared with that of one surface sensing structure. An AMZI device structure is designed. The single mode condition, the length of the sensing arm, and the length deviation between the sensing arm and the reference arm are optimized. The length deviation is optimized to be 19.8 μm in a refractive index range between 1.470 and 1.545. We fabricate the AMZI waveguide by lithography and wet etching method. The imprinting bonding and laser polishing method is proposed and investigated. The insertion loss is between-80.36 dB and-10.63 dB. The average and linear sensitivity are 768.1 dB/RIU and 548.95 dB/RIU, respectively. And the average and linear detection resolution of the sensor are 1.30×10^-6 RIU (RIU:refractive index unit) and 1.82×10^-5 RIU, respectively. This sensor has a fast and cost-effective fabrication process which can be used in the cases of requiring portability and disposability.

关键词: integrated optics devices, polymer waveguides, sensors, microstructure fabrication

Abstract: We present an all polymer asymmetric Mach-Zehnder interferometer (AMZI) waveguide sensor based on imprinting bonding and laser polishing method. The fabrication methods are compatible with high accuracy waveguide sensing structure. The rectangle waveguide structure of this sensor has three sensing surfaces contacting the test media, and its sensing accuracy can be increased 5 times compared with that of one surface sensing structure. An AMZI device structure is designed. The single mode condition, the length of the sensing arm, and the length deviation between the sensing arm and the reference arm are optimized. The length deviation is optimized to be 19.8 μm in a refractive index range between 1.470 and 1.545. We fabricate the AMZI waveguide by lithography and wet etching method. The imprinting bonding and laser polishing method is proposed and investigated. The insertion loss is between-80.36 dB and-10.63 dB. The average and linear sensitivity are 768.1 dB/RIU and 548.95 dB/RIU, respectively. And the average and linear detection resolution of the sensor are 1.30×10^-6 RIU (RIU:refractive index unit) and 1.82×10^-5 RIU, respectively. This sensor has a fast and cost-effective fabrication process which can be used in the cases of requiring portability and disposability.

Key words: integrated optics devices, polymer waveguides, sensors, microstructure fabrication

中图分类号: (Optical waveguides and couplers)

42.79.Gn

42.70.Jk (Polymers and organics) 42.81.Pa (Sensors, gyros) 42.79.-e (Optical elements, devices, and systems)

刘豫, 孙月, 衣云骥, 田亮, 曹悦, 陈长鸣, 孙小强, 张大明. All polymer asymmetric Mach-Zehnder interferometer waveguide sensor by imprinting bonding and laser polishing[J]. 中国物理B, 2017, 26(12): 124215-124215.

Yu Liu(刘豫), Yue Sun(孙月), Yun-Ji Yi(衣云骥), Liang Tian(田亮), Yue Cao(曹悦), Chang-Ming Chen(陈长鸣), Xiao-Qiang Sun(孙小强), Da-Ming Zhang(张大明). All polymer asymmetric Mach-Zehnder interferometer waveguide sensor by imprinting bonding and laser polishing[J]. Chin. Phys. B, 2017, 26(12): 124215-124215.

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All polymer asymmetric Mach-Zehnder interferometer waveguide sensor by imprinting bonding and laser polishing

All polymer asymmetric Mach-Zehnder interferometer waveguide sensor by imprinting bonding and laser polishing

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