Microfluidic temperature sensor based on temperature-dependent dielectric property of liquid

doi:10.1088/1674-1056/ab593c

中国物理B ›› 2020, Vol. 29 ›› Issue (1): 10701-010701.doi: 10.1088/1674-1056/ab593c

• SPECIAL TOPIC—Recent advances in thermoelectric materials and devices • 上一篇下一篇

Microfluidic temperature sensor based on temperature-dependent dielectric property of liquid

Qi Liu(刘琦), Yu-Feng Yu(俞钰峰), Wen-Sheng Zhao(赵文生), Hui Li(李慧)

1 School of Automation, Hangzhou Dianzi University, Hangzhou 310018, China;
2 School of Electronics and Information, Hangzhou Dianzi University, Hangzhou 310018, China;
3 School of Information and Communication Engineering, Dalian University of Technology, Dalian 116024, China

收稿日期:2019-08-22 修回日期:2019-11-04 出版日期:2020-01-05 发布日期:2020-01-05
通讯作者: Hui Li E-mail:Hui.li@dlut.edu.cn
基金资助:
Project supported by the Natural Science Foundation of Zhejiang Province, China (Grant No. LQ19F010007), the National Natural Science Foundation of China (Grants Nos. 61901146 and 61874038), and the Smart City Collaborative Innovation Center of Zhejiang Province, China.

Microfluidic temperature sensor based on temperature-dependent dielectric property of liquid

Qi Liu(刘琦)¹, Yu-Feng Yu(俞钰峰)², Wen-Sheng Zhao(赵文生)², Hui Li(李慧)³

1 School of Automation, Hangzhou Dianzi University, Hangzhou 310018, China;
2 School of Electronics and Information, Hangzhou Dianzi University, Hangzhou 310018, China;
3 School of Information and Communication Engineering, Dalian University of Technology, Dalian 116024, China

Received:2019-08-22 Revised:2019-11-04 Online:2020-01-05 Published:2020-01-05
Contact: Hui Li E-mail:Hui.li@dlut.edu.cn
Supported by:
Project supported by the Natural Science Foundation of Zhejiang Province, China (Grant No. LQ19F010007), the National Natural Science Foundation of China (Grants Nos. 61901146 and 61874038), and the Smart City Collaborative Innovation Center of Zhejiang Province, China.

摘要/Abstract

摘要： We propose a low-cost compact microfluidic temperature sensor by virtue of the temperature-dependent permittivity of liquid. The sensor is composed of a coplanar waveguide (CPW) transmission line loaded with three resonators and a microfluidic plate with three channels. The resonant frequency of each resonator relies on the temperature-dependent dielectric property of liquid in corresponding channel, which therefore can be used to extract the temperature. The proposed sensor features a compact size and low cost since it requires only micro fluid volume instead of additional electronic components to produce significant frequency shift with changing temperature. Moreover, it exhibits decent accuracy and stability in a temperature sensing range from 30 ^oC to 95 ^oC. A theoretical analysis of the sensor is provided, followed by the detailed characterization method, and a prototype is designed, manufactured, and measured to verify the theoretical analysis.

关键词: microfluidics, sensors, permittivity, dielectric liquid

Abstract: We propose a low-cost compact microfluidic temperature sensor by virtue of the temperature-dependent permittivity of liquid. The sensor is composed of a coplanar waveguide (CPW) transmission line loaded with three resonators and a microfluidic plate with three channels. The resonant frequency of each resonator relies on the temperature-dependent dielectric property of liquid in corresponding channel, which therefore can be used to extract the temperature. The proposed sensor features a compact size and low cost since it requires only micro fluid volume instead of additional electronic components to produce significant frequency shift with changing temperature. Moreover, it exhibits decent accuracy and stability in a temperature sensing range from 30 ^oC to 95 ^oC. A theoretical analysis of the sensor is provided, followed by the detailed characterization method, and a prototype is designed, manufactured, and measured to verify the theoretical analysis.

Key words: microfluidics, sensors, permittivity, dielectric liquid

中图分类号: (Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)

07.07.Df

07.50.-e (Electrical and electronic instruments and components)

刘琦, 俞钰峰, 赵文生, 李慧. Microfluidic temperature sensor based on temperature-dependent dielectric property of liquid[J]. 中国物理B, 2020, 29(1): 10701-010701.

Qi Liu(刘琦), Yu-Feng Yu(俞钰峰), Wen-Sheng Zhao(赵文生), Hui Li(李慧). Microfluidic temperature sensor based on temperature-dependent dielectric property of liquid[J]. Chin. Phys. B, 2020, 29(1): 10701-010701.

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Microfluidic temperature sensor based on temperature-dependent dielectric property of liquid

Microfluidic temperature sensor based on temperature-dependent dielectric property of liquid

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