Chin. Phys. B ›› 2014, Vol. 23 ›› Issue (1): 18501-018501.doi: 10.1088/1674-1056/23/1/018501

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇    下一篇

Quasi-two-dimensional threshold voltage model for junctionless cylindrical surrounding gate metal-oxide-semiconductor field-effect transistor with dual-material gate

李聪, 庄奕琪, 张丽, 靳刚   

  1. School of Microelectronics, Xidian University, Xi’an 710071, China
  • 收稿日期:2013-04-24 修回日期:2013-06-17 出版日期:2013-11-12 发布日期:2013-11-12
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 61204092 and 61076101) and the Fundamental Research Funds for the Central Universities of Ministry of Education of China (Grant No. K50511250001).

Quasi-two-dimensional threshold voltage model for junctionless cylindrical surrounding gate metal-oxide-semiconductor field-effect transistor with dual-material gate

Li Cong (李聪), Zhuang Yi-Qi (庄奕琪), Zhang Li (张丽), Jin Gang (靳刚)   

  1. School of Microelectronics, Xidian University, Xi’an 710071, China
  • Received:2013-04-24 Revised:2013-06-17 Online:2013-11-12 Published:2013-11-12
  • Contact: Li Cong E-mail:cong.li@mail.xidian.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 61204092 and 61076101) and the Fundamental Research Funds for the Central Universities of Ministry of Education of China (Grant No. K50511250001).

摘要: Based on the quasi-two-dimensional (2D) solution of Poisson’s equation in two continuous channel regions, an analytical threshold voltage model for short-channel junctionless dual-material cylindrical surrounding-gate (JLDMCSG) metal-oxide-semiconductor field-effect transistor (MOSFET) is developed. Using the derived model, channel potential distribution, horizontal electrical field distribution, and threshold voltage roll-off of JLDMCSG MOSFET are investigated. Compared with junctionless single-material CSG (JLSGCSG) MOSFET, JLDMCSG MOSFET can effectively suppress short-channel effects and simultaneously improve carrier transport efficiency. It is also revealed that threshold voltage roll-off of JLDMCSG can be significantly reduced by adopting both a small oxide thickness and a small silicon channel radius. The model is verified by comparing its calculated results with that obtained from three-dimensional (3D) numerical device simulator ISE.

关键词: junctionless device, surrounding-gate MOSFET, dual-material gate, analytical model

Abstract: Based on the quasi-two-dimensional (2D) solution of Poisson’s equation in two continuous channel regions, an analytical threshold voltage model for short-channel junctionless dual-material cylindrical surrounding-gate (JLDMCSG) metal-oxide-semiconductor field-effect transistor (MOSFET) is developed. Using the derived model, channel potential distribution, horizontal electrical field distribution, and threshold voltage roll-off of JLDMCSG MOSFET are investigated. Compared with junctionless single-material CSG (JLSGCSG) MOSFET, JLDMCSG MOSFET can effectively suppress short-channel effects and simultaneously improve carrier transport efficiency. It is also revealed that threshold voltage roll-off of JLDMCSG can be significantly reduced by adopting both a small oxide thickness and a small silicon channel radius. The model is verified by comparing its calculated results with that obtained from three-dimensional (3D) numerical device simulator ISE.

Key words: junctionless device, surrounding-gate MOSFET, dual-material gate, analytical model

中图分类号:  (Semiconductor-device characterization, design, and modeling)

  • 85.30.De
73.40.Qv (Metal-insulator-semiconductor structures (including semiconductor-to-insulator)) 02.60.Cb (Numerical simulation; solution of equations)