Tunable structural color of anodic tantalum oxide films

doi:10.1088/1674-1056/21/8/088101

中国物理B ›› 2012, Vol. 21 ›› Issue (8): 88101-088101.doi: 10.1088/1674-1056/21/8/088101

• INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY • 上一篇下一篇

Tunable structural color of anodic tantalum oxide films

盛翠翠^a, 蔡云雨^a, 代恩梅^b, 梁长浩^a

a Key Laboratory of Materials Physics and Anhui Key Laboratory of Nanomaterials and Nanotechnology, Institute of Solid State Physics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China;
b Information Center, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China

收稿日期:2012-02-06 修回日期:2012-02-25 出版日期:2012-07-01 发布日期:2012-07-01

Tunable structural color of anodic tantalum oxide films

Sheng Cui-Cui (盛翠翠)^a, Cai Yun-Yu (蔡云雨)^a, Dai En-Mei (代恩梅)^b, Liang Chang-Hao (梁长浩 )^a

a Key Laboratory of Materials Physics and Anhui Key Laboratory of Nanomaterials and Nanotechnology, Institute of Solid State Physics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China;
b Information Center, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China

Received:2012-02-06 Revised:2012-02-25 Online:2012-07-01 Published:2012-07-01
Contact: Liang Chang-Hao E-mail:chliang@issp.ac.cn

摘要/Abstract

摘要： Tantalum (Ta) oxide films with tunable structural color were fabricated facilely using anodic oxidation. The structure, components, and surface valence states of the oxide films were investigated by using gazing incidence X-ray diffractometry, X-ray photoelectron microscopy, and surface analytical techniques. Their thickness and optical properties were studied by using spectroscopic ellipsometry and total reflectance spectrum. Color was accurately defined using L^*a^*b^* scale. The thickness of compact Ta₂O₅ films was linearly dependent on anodizing voltage. The film color was tunable by adjusting the anodic voltage. The difference in color appearance is resulted from the interference behavior between the interfaces of air-oxide and oxide-metal.

关键词: anodic tantalum oxide, structural color, spectroscopic ellipsometry, optical interference

Abstract: Tantalum (Ta) oxide films with tunable structural color were fabricated facilely using anodic oxidation. The structure, components, and surface valence states of the oxide films were investigated by using gazing incidence X-ray diffractometry, X-ray photoelectron microscopy, and surface analytical techniques. Their thickness and optical properties were studied by using spectroscopic ellipsometry and total reflectance spectrum. Color was accurately defined using L^*a^*b^* scale. The thickness of compact Ta₂O₅ films was linearly dependent on anodizing voltage. The film color was tunable by adjusting the anodic voltage. The difference in color appearance is resulted from the interference behavior between the interfaces of air-oxide and oxide-metal.

Key words: anodic tantalum oxide, structural color, spectroscopic ellipsometry, optical interference

中图分类号: (Amorphous semiconductors)

81.05.Gc

42.25.Hz (Interference) 78.20.-e (Optical properties of bulk materials and thin films) 78.20.Ci (Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity))

盛翠翠, 蔡云雨, 代恩梅, 梁长浩 . Tunable structural color of anodic tantalum oxide films[J]. 中国物理B, 2012, 21(8): 88101-088101.

Sheng Cui-Cui (盛翠翠), Cai Yun-Yu (蔡云雨), Dai En-Mei (代恩梅), Liang Chang-Hao (梁长浩 ). Tunable structural color of anodic tantalum oxide films[J]. Chin. Phys. B, 2012, 21(8): 88101-088101.

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Tunable structural color of anodic tantalum oxide films

Tunable structural color of anodic tantalum oxide films

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