A large bandwidth photonic delay line using passive cascaded silicon-on-insulator microring resonators

doi:10.1088/1674-1056/20/7/074208

中国物理B ›› 2011, Vol. 20 ›› Issue (7): 74208-074208.doi: 10.1088/1674-1056/20/7/074208

A large bandwidth photonic delay line using passive cascaded silicon-on-insulator microring resonators

樊中朝¹, 韩伟华¹, 胡应涛², 肖希², 李智勇², 李运涛², 俞育德², 余金中²

(1)Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (2)State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

收稿日期:2011-01-25 修回日期:2011-02-27 出版日期:2011-07-15 发布日期:2011-07-15

A large bandwidth photonic delay line using passive cascaded silicon-on-insulator microring resonators

Hu Ying-Tao(胡应涛)^a), Xiao Xi(肖希)^a), Li Zhi-Yong(李智勇)^a), Li Yun-Tao(李运涛)^a), Fan Zhong-Chao(樊中朝)^b), Han Wei-Hua(韩伟华)^b), Yu Yu-De(俞育德)^a), and Yu Jin-Zhong(余金中)^a)†

^a State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; ^b Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Received:2011-01-25 Revised:2011-02-27 Online:2011-07-15 Published:2011-07-15

摘要/Abstract

摘要： This paper investigated the design and the characterization of a photonic delay line based on passive cascaded silicon-on-insulator (SOI) microrings. We considered the compromise of group delay, bandwidth and insertion loss. A 3-stage double channel side-coupled integrated spaced sequence of resonator (SCISSOR) device was optimized by shifting the resonance of each microring and fabricated with electron beam lithography and dry etching. The group delay was measured to be 17 ps for non-return-to-zero signals at different bit rates and the bandwidth of 78 GHz was achieved. The experiment result agreed well with our simulation.

关键词: group delay, delay line, slow light, microring resonator

Abstract: This paper investigated the design and the characterization of a photonic delay line based on passive cascaded silicon-on-insulator (SOI) microrings. We considered the compromise of group delay, bandwidth and insertion loss. A 3-stage double channel side-coupled integrated spaced sequence of resonator (SCISSOR) device was optimized by shifting the resonance of each microring and fabricated with electron beam lithography and dry etching. The group delay was measured to be 17 ps for non-return-to-zero signals at different bit rates and the bandwidth of 78 GHz was achieved. The experiment result agreed well with our simulation.

Key words: group delay, delay line, slow light, microring resonator

中图分类号: (Resonators, cavities, amplifiers, arrays, and rings)

42.60.Da

42.79.-e (Optical elements, devices, and systems) 42.82.-m (Integrated optics)

胡应涛, 肖希, 李智勇, 李运涛, 樊中朝, 韩伟华, 俞育德, 余金中. A large bandwidth photonic delay line using passive cascaded silicon-on-insulator microring resonators[J]. 中国物理B, 2011, 20(7): 74208-074208.

Hu Ying-Tao(胡应涛), Xiao Xi(肖希), Li Zhi-Yong(李智勇), Li Yun-Tao(李运涛), Fan Zhong-Chao(樊中朝), Han Wei-Hua(韩伟华), Yu Yu-De(俞育德), and Yu Jin-Zhong(余金中). A large bandwidth photonic delay line using passive cascaded silicon-on-insulator microring resonators[J]. Chin. Phys. B, 2011, 20(7): 74208-074208.

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A large bandwidth photonic delay line using passive cascaded silicon-on-insulator microring resonators

A large bandwidth photonic delay line using passive cascaded silicon-on-insulator microring resonators

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