中国物理B ›› 2022, Vol. 31 ›› Issue (1): 14201-014201.doi: 10.1088/1674-1056/ac2e64

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Bandwidth-tunable silicon nitride microring resonators

Jiacheng Liu(刘嘉成), Chao Wu(吴超), Gongyu Xia(夏功榆), Qilin Zheng(郑骑林), Zhihong Zhu(朱志宏), and Ping Xu(徐平)†   

  1. Hunan Provincial Key Laboratory of Novel Nano-Optoelectronic Information Materials and Device, Institute for Quantum Information and State Key Laboratory of High Performance Computing, College of Advanced Interdisciplinary Studies&College of Computer, National University of Defense Technology, Changsha 410073, China
  • 收稿日期:2021-09-30 修回日期:2021-10-09 接受日期:2021-10-11 出版日期:2021-12-03 发布日期:2021-12-31
  • 通讯作者: Ping Xu E-mail:pingxu520@nju.edu.cn
  • 基金资助:
    Project supported by the National Key Research and Development Program of China (Grant Nos. 2019YFA0308700 and 2017YFA0303700), the National Natural Science Foundation of China (Grant Nos. 11627810 and 11690031), and the Open Funds from the State Key Laboratory of High Performance Computing of China (HPCL, National University of Defense Technology).

Bandwidth-tunable silicon nitride microring resonators

Jiacheng Liu(刘嘉成), Chao Wu(吴超), Gongyu Xia(夏功榆), Qilin Zheng(郑骑林), Zhihong Zhu(朱志宏), and Ping Xu(徐平)†   

  1. Hunan Provincial Key Laboratory of Novel Nano-Optoelectronic Information Materials and Device, Institute for Quantum Information and State Key Laboratory of High Performance Computing, College of Advanced Interdisciplinary Studies&College of Computer, National University of Defense Technology, Changsha 410073, China
  • Received:2021-09-30 Revised:2021-10-09 Accepted:2021-10-11 Online:2021-12-03 Published:2021-12-31
  • Contact: Ping Xu E-mail:pingxu520@nju.edu.cn
  • Supported by:
    Project supported by the National Key Research and Development Program of China (Grant Nos. 2019YFA0308700 and 2017YFA0303700), the National Natural Science Foundation of China (Grant Nos. 11627810 and 11690031), and the Open Funds from the State Key Laboratory of High Performance Computing of China (HPCL, National University of Defense Technology).

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摘要： We designed a reconfigurable dual-interferometer coupled silicon nitride microring resonator. By tuning the integrated heater on interferometer's arms, the "critical coupling" bandwidth of resonant mode is continuously adjustable whose quality factor varies from 7.9×104 to 1.9×105 with the extinction ratio keeping higher than 25 dB. Also a variety of coupling spanning from "under-coupling" to "over-coupling" were achieved, showing the ability to tune the quality factor from 6.0×103 to 2.3×105. Our design can provide an adjustable filtering method on silicon nitride photonic chip and contribute to optimize the nonlinear process for quantum photonics and all-optical signal processing.

关键词: silicon nitride, microring resonators, Mach-Zehnder interferometer, ring filter, nonlinear optics

Abstract: We designed a reconfigurable dual-interferometer coupled silicon nitride microring resonator. By tuning the integrated heater on interferometer's arms, the "critical coupling" bandwidth of resonant mode is continuously adjustable whose quality factor varies from 7.9×104 to 1.9×105 with the extinction ratio keeping higher than 25 dB. Also a variety of coupling spanning from "under-coupling" to "over-coupling" were achieved, showing the ability to tune the quality factor from 6.0×103 to 2.3×105. Our design can provide an adjustable filtering method on silicon nitride photonic chip and contribute to optimize the nonlinear process for quantum photonics and all-optical signal processing.

Key words: silicon nitride, microring resonators, Mach-Zehnder interferometer, ring filter, nonlinear optics

中图分类号:  (Nonlinear optics)

  • 42.65.-k
42.65.Wi (Nonlinear waveguides)