Impact of nitrogen doping on growth and hydrogen impurity incorporation of thick nanocrystalline diamond films

doi:10.1088/1674-1056/20/5/058104

中国物理B ›› 2011, Vol. 20 ›› Issue (5): 58104-058104.doi: 10.1088/1674-1056/20/5/058104

Impact of nitrogen doping on growth and hydrogen impurity incorporation of thick nanocrystalline diamond films

顾利萍¹, 江学范¹, 唐春玖²

(1)Department of Physics, Jiangsu Key Laboratory for Advanced Functional Materials, Changshu Institute of Technology, Changshu 215500, China; (2)Department of Physics, Jiangsu Key Laboratory for Advanced Functional Materials, Changshu Institute of Technology, Changshu 215500, China;Department of Physics, I3N (Institute for Nanostructures, Nanomodelling and Nanofabrication), University of Aveiro, Campus Universitário de Santiago, 3810-193 Aveiro, Portugal

收稿日期:2010-11-22 修回日期:2010-12-27 出版日期:2011-05-15 发布日期:2011-05-15
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 10874021) and Natural Science Foundation of Educational Department of Jiangsu Province of China (Grant No. 06kja43014).

Impact of nitrogen doping on growth and hydrogen impurity incorporation of thick nanocrystalline diamond films

Gu Li-Ping (顾利萍)^a, Tang Chun-Jiu (唐春玖)^ab, Jiang Xue-Fan (江学范)^a, J. L. Pinto^b

^a Department of Physics, Jiangsu Key Laboratory for Advanced Functional Materials, Changshu Institute of Technology, Changshu 215500, China; ^b Department of Physics, I3N (Institute for Nanostructures, Nanomodelling and Nanofabrication), University of Aveiro, Campus Universitário de Santiago, 3810-193 Aveiro, Portugal

Received:2010-11-22 Revised:2010-12-27 Online:2011-05-15 Published:2011-05-15
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 10874021) and Natural Science Foundation of Educational Department of Jiangsu Province of China (Grant No. 06kja43014).

摘要/Abstract

摘要： A much larger amount of bonded hydrogen was found in thick nanocrystalline diamond (NCD) films produced by only adding 0.24% N₂ into 4% CH₄/H₂ plasma, as compared to the high quality transparent microcrystalline diamond (MCD) films, grown using the same growth parameters except for nitrogen. These experimental results clearly evidence that defect formation and impurity incorporation (for example, N and H) impeding diamond grain growth is the main formation mechanism of NCD upon nitrogen doping and strongly support the model proposed in the literature that nitrogen competes with CH_x (x=1,2,3) growth species for adsorption sites.

关键词: thick nanocrystalline diamond films, nitrogen doping, crystalline quality

Abstract: A much larger amount of bonded hydrogen was found in thick nanocrystalline diamond (NCD) films produced by only adding 0.24% N₂ into 4% CH₄/H₂ plasma, as compared to the high quality transparent microcrystalline diamond (MCD) films, grown using the same growth parameters except for nitrogen. These experimental results clearly evidence that defect formation and impurity incorporation (for example, N and H) impeding diamond grain growth is the main formation mechanism of NCD upon nitrogen doping and strongly support the model proposed in the literature that nitrogen competes with CH_x (x=1,2,3) growth species for adsorption sites.

Key words: thick nanocrystalline diamond films, nitrogen doping, crystalline quality

中图分类号: (Chemical vapor deposition (including plasma-enhanced CVD, MOCVD, ALD, etc.))

81.15.Gh

81.05.ug (Diamond) 81.07.-b (Nanoscale materials and structures: fabrication and characterization)

顾利萍, 唐春玖, 江学范, J. L. Pinto. Impact of nitrogen doping on growth and hydrogen impurity incorporation of thick nanocrystalline diamond films[J]. 中国物理B, 2011, 20(5): 58104-058104.

Gu Li-Ping (顾利萍), Tang Chun-Jiu (唐春玖), Jiang Xue-Fan (江学范), J. L. Pinto. Impact of nitrogen doping on growth and hydrogen impurity incorporation of thick nanocrystalline diamond films[J]. Chin. Phys. B, 2011, 20(5): 58104-058104.

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Impact of nitrogen doping on growth and hydrogen impurity incorporation of thick nanocrystalline diamond films

Impact of nitrogen doping on growth and hydrogen impurity incorporation of thick nanocrystalline diamond films

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