[1] |
Lieberman M A and Lichtenberg A J 2005 Principles of Plasma Discharges and Materials Processing (2nd ed.) (Hoboken, NJ: Wiley) pp1, 14, 299
|
[2] |
Huang S, Xin Y and Ning Z Y 2005 Chin. Phys. 14 1608
|
[3] |
Xu X, Li L S, Liu F, Zhou Q H and Liang R Q 2008 Chin. Phys. B 17 4242
|
[4] |
Nagai M and Horia M 2006 J. Vac. Sci. Technol. A 24 1760
|
[5] |
Yuan Y, Ye C, Huang H W, Shi G F and Ning Z Y 2010 Chin. Phys. B 19 065205
|
[6] |
Goto H H, Lowe H D and Ohmi T 1992 J. Vac. Sci. Technol. A 10 3048
|
[7] |
Boyle P C, Ellingboe A R and Turner M M 2004 J. Phys. D: Appl. Phys. 37 697
|
[8] |
Colgan M J, Meyyappan M and Murnick D E 1994 Plasma Sources Sci. Technol. 3 181
|
[9] |
Zhu X M, Chen W C, Zhang S, Guo Z G, Hu D W and Pu Y K 2007 J. Phys. D: Appl. Phys. 40 7019
|
[10] |
Chen F F 1965 in: Huddlestone R H and Leonard S L (eds.) Plasma Diagnostic Techniques (New York: Academic) p113
|
[11] |
Sudit I D and Chen F F 1994 Plasma Sources Sci. Technol. 3 162
|
[12] |
Ahn S K, You S J and Chang H Y 2006 Appl. Phys. Lett. 89 161506
|
[13] |
Ahn S K and Chang H Y 2009 Appl. Phys. Lett. 95 111502
|
[14] |
Donnelly V M 2004 J. Phys. D: Appl. Phys. 37 R217
|
[15] |
Malyshev M V and Donnelly V M 1999 Phys. Rev. E 60 6016
|
[16] |
Stafford L, Khare R, Donnelly V M, Margot J and Moisan M 2009 Appl. Phys. Lett. 94 021503
|
[17] |
Palmero A, van Hattum E D, Rudolph H and Habraken F H P M 2007 J. Appl. Phys. 101 053306
|
[18] |
Zhu X M and Pu Y K 2007 J. Phys. D: Appl. Phys. 40 2533
|
[19] |
Vlcek J 1989 J. Phys. D 22 623
|
[20] |
Bogaerts A, Gijbels R and Vlcek J 1998 J. Appl. Phys. 84 121
|
[21] |
Bultel A, van Ootegem B, Bourdon A and Vervisch P 2002 Phys. Rev. E 65 046406
|
[22] |
Iordanova S and Koleva I 2007 Spectrochim. Acta B 62 344
|
[23] |
Yanguas-Gil A, Cotrino J and Gonzalez-Elipe A R 2005 Phys Rev. E 72 016401
|
[24] |
Yanguas-Gil A, Cotrino J and Gonzalez-Elipe A R 2006 J. Appl. Phys. 99 033104
|
[25] |
Akatsuka H 2009 Phys. Plasmas 16 043502
|
[26] |
Boffard J B, Lin C C and DeJoseph Jr C A 2004 J. Phys. D: Appl. Phys. 37 R143
|
[27] |
Chutjian A and Cartwright D C 1981 Phys. Rev. A 23 2178
|
[28] |
Bretagne J, Godart J and Puech V 1982 J. Phys. D 15 2205
|
[29] |
Hyman H A 1978 Phys. Rev. A 18 441
|
[30] |
Kimura A, Kobayashi H, Nishida M and Valentin P 1985 J. Quant. Spectrosc. Radiat. Transfer 34 189
|
[31] |
Chilton J E, Boffard J B, Schappe R S and Lin C C 1998 Phys. Rev. A 57 267
|
[32] |
Boffard J B, Piech G A, Gehrke M F, Anderson L W and Lin C C 1999 Phys. Rev. A 59 2749
|
[33] |
Yanguas-Gil A, Cotrino J and Alves L L 2005 J. Phys. D: Appl. Phys. 38 1588
|
[34] |
NIST 2009 Atomic Spectra Database
|
[35] |
Wiese W L, Brault J W, Danzmann K, Helbig V and Kock M 1989 Phys. Rev. A 39 2461
|
[36] |
Lilly R A 1976 J. Opt. Soc. Am. 66 245
|
[37] |
Katsonis K and Drawin H W 1980 J. Quant. Spectrosc. Radiat. Transfer 23 1
|
[38] |
Holstein T 1951 Phys. Rev. 83 1159
|
[39] |
Zhu X M and Pu Y K 2010 J. Phys. D: Appl. Phys. 43 015204
|
[40] |
Boivin R F, Kline J L and Scime E E 2001 Phys. Plasmas 8 5303
|
[41] |
Chantry P J 1987 J. Appl. Phys. 62 1141
|
[42] |
Tachibana K 1986 Phys. Rev. A 34 1007
|
[43] |
Huang X J, Xin Y, Yuan Q H and Ning Z Y 2008 Phys. Plasmas 15 073501
|
[44] |
McWhirter R W P 1965 in: Huddlestone R H and Leonard S L (eds.) Plasma Diagnostic Techniques (New York: Academic) p201 endfootnotesize
|