中国物理B ›› 1994, Vol. 3 ›› Issue (8): 617-622.doi: 10.1088/1004-423X/3/8/008

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇    下一篇

A MBE ON-LINE OPTICAL MODULATION PHOTOREFLECTANCE ANALYSIS SYSTEM

何元金, 董悦梅, 段晓东   

  1. Department of Modern Applied Physics, Tsinghua University, Beijing 100084, China
  • 收稿日期:1993-04-07 出版日期:1994-08-20 发布日期:1994-08-20

A MBE ON-LINE OPTICAL MODULATION PHOTOREFLECTANCE ANALYSIS SYSTEM

HE YUAN-JIN (何元金), DONG YUE-MEI (董悦梅), DUAN XIAO-DONG (段晓东)   

  1. Department of Modern Applied Physics, Tsinghua University, Beijing 100084, China
  • Received:1993-04-07 Online:1994-08-20 Published:1994-08-20

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摘要： An on-line optical modulation photoreflectance (PR) spectroscopy analysis system asso-cinted with the molecular beam epitaxy (MBE) system has been designed and established. This paper reports in detail the optical design, the experimental arrangement, and the adjust-ment of the system. GaAs film samples grown by MBE on Si-substrate have been measured with this on-line system. The results show that the on-line PR spectroscopy can characterize the quality of the as-grown film samples qualitatively and promptly.

Abstract: An on-line optical modulation photoreflectance (PR) spectroscopy analysis system asso-cinted with the molecular beam epitaxy (MBE) system has been designed and established. This paper reports in detail the optical design, the experimental arrangement, and the adjust-ment of the system. GaAs film samples grown by MBE on Si-substrate have been measured with this on-line system. The results show that the on-line PR spectroscopy can characterize the quality of the as-grown film samples qualitatively and promptly.

中图分类号:  (Optical properties of bulk materials and thin films)

  • 78.20.-e
81.15.Hi (Molecular, atomic, ion, and chemical beam epitaxy) 68.55.A- (Nucleation and growth) 78.66.Fd (III-V semiconductors)