中国物理B ›› 2026, Vol. 35 ›› Issue (8): 84207-084207.doi: 10.1088/1674-1056/ae156d

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Proton-implanted CeO2/Sb2O3-co-doped phosphate glass waveguides and its annealing evolution

Chun-Xiao Liu(刘春晓)1,†, Shi-Yu Chen(陈诗语)1, Jia-Pei Wu(吴佳佩)1, Quan-Long He(贺全龙)2, Jian-Fei Guan(关建飞)1, Liao-Lin Zhang(张料林)3, and Hai-Tao Guo(郭海涛)4   

  1. 1 College of Electronic and Optical Engineering, Nanjing University of Post and Telecommunications, Nanjing 210023, China;
    2 Logging Technology Research Institute, China National Logging Corporation, Xi'an 710077, China;
    3 School of Material Science and Engineering, Jiangxi University of Science and Technology, Ganzhou 341000, China;
    4 State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences (CAS), Xi'an 710119, China
  • 收稿日期:2025-09-15 修回日期:2025-10-20 接受日期:2025-10-21 发布日期:2026-08-06
  • 通讯作者: Chun-Xiao Liu E-mail:chunxiaoliu@njupt.edu.cn
  • 基金资助:
    Project supported by the Postgraduate Research and Innovation Program of Jiangsu Province, China (Grant No KYCX25 1134), the National Natural Science Foundation of China (Grant No. 11405041), the Key Research and Development Program of Jiangxi Province, China (Grant No. 20223BBE51020), and the Opening Fund of Key Laboratory of Rare Earths (Chinese Academy of Sciences).

Proton-implanted CeO2/Sb2O3-co-doped phosphate glass waveguides and its annealing evolution

Chun-Xiao Liu(刘春晓)1,†, Shi-Yu Chen(陈诗语)1, Jia-Pei Wu(吴佳佩)1, Quan-Long He(贺全龙)2, Jian-Fei Guan(关建飞)1, Liao-Lin Zhang(张料林)3, and Hai-Tao Guo(郭海涛)4   

  1. 1 College of Electronic and Optical Engineering, Nanjing University of Post and Telecommunications, Nanjing 210023, China;
    2 Logging Technology Research Institute, China National Logging Corporation, Xi'an 710077, China;
    3 School of Material Science and Engineering, Jiangxi University of Science and Technology, Ganzhou 341000, China;
    4 State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences (CAS), Xi'an 710119, China
  • Received:2025-09-15 Revised:2025-10-20 Accepted:2025-10-21 Published:2026-08-06
  • Contact: Chun-Xiao Liu E-mail:chunxiaoliu@njupt.edu.cn
  • Supported by:
    Project supported by the Postgraduate Research and Innovation Program of Jiangsu Province, China (Grant No KYCX25 1134), the National Natural Science Foundation of China (Grant No. 11405041), the Key Research and Development Program of Jiangxi Province, China (Grant No. 20223BBE51020), and the Opening Fund of Key Laboratory of Rare Earths (Chinese Academy of Sciences).

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摘要： Proton implantation has received increasing attention in the field of optical waveguide fabrication. It is meaningful to explore the annealing effects on the guiding properties of the proton-implanted waveguides. In this work, the CeO$_{2}$/Sb$_{2}$O$_{3}$-co-doped phosphate glass waveguides were formed by 400-keV proton implantation, and the proton fluence was chosen to be 8$\times10^{16}$ ions/cm$^{2}$. The implanted glass was annealed in a series of 60-min thermal treatments at temperatures ranging from 260 $^\circ$C to 360 $^\circ$C. After each annealing treatment, the modes and their effective refractive indices were measured at 632.8 nm by a prism coupling system. The near-field intensity distribution of the zeroth-order mode was recorded by using an end-face coupling method. The mechanism of the planar waveguide formation is discussed by simulating the energy loss distribution and calculating the refractive index profile. It can enhance theoretical and experimental references for the development of integrated photonic devices by implantation and annealing.

关键词: optical waveguide, proton implantation, CeO$_{2}$/Sb$_{2}$O$_{3}$-co-doped phosphate glass, thermal treatment

Abstract: Proton implantation has received increasing attention in the field of optical waveguide fabrication. It is meaningful to explore the annealing effects on the guiding properties of the proton-implanted waveguides. In this work, the CeO$_{2}$/Sb$_{2}$O$_{3}$-co-doped phosphate glass waveguides were formed by 400-keV proton implantation, and the proton fluence was chosen to be 8$\times10^{16}$ ions/cm$^{2}$. The implanted glass was annealed in a series of 60-min thermal treatments at temperatures ranging from 260 $^\circ$C to 360 $^\circ$C. After each annealing treatment, the modes and their effective refractive indices were measured at 632.8 nm by a prism coupling system. The near-field intensity distribution of the zeroth-order mode was recorded by using an end-face coupling method. The mechanism of the planar waveguide formation is discussed by simulating the energy loss distribution and calculating the refractive index profile. It can enhance theoretical and experimental references for the development of integrated photonic devices by implantation and annealing.

Key words: optical waveguide, proton implantation, CeO$_{2}$/Sb$_{2}$O$_{3}$-co-doped phosphate glass, thermal treatment

中图分类号:  (Optical waveguides and couplers)

  • 42.79.Gn
61.80.Jh (Ion radiation effects)